Preparation of copper thin film mask by sputtering technique assisted by polymer mask photolithography

C Pakpum - IOP Conference Series: Materials Science and …, 2017 - iopscience.iop.org
This research aims to build cheaply homemade DC magnetron sputtering system for deposit
metal thin films on substrate by assist of polymer mask photolithography. The metal thin film …

Low-Cost Sputtering Process for Carbon Nanotubes Synthesis

T Thurakitseree, C Pakpum - Applied Mechanics and Materials, 2019 - Trans Tech Publ
According to their wonderful properties, carbon nanotubes (CNTs) have been well known for
decades. The synthesis process and catalyst deposition method have also drawn attention …