According to the Chinese yin-yang concept, seemingly opposing forces give rise and
respond to each other. Opposing forces, whether passive or active, are also at work when …

This paper reviews the current status of small force metrology for quantitative instrumented
indentation and atomic force microscopy (AFM), and in particular focuses on new electrical …

Piezoresistive sensors are among the earliest micromachined silicon devices. The need for
smaller, less expensive, higher performance sensors helped drive early micromachining …

Working at the nano-scale demands an understanding of the high-precision measurement
techniques that make nanotechnology and advanced manufacturing possible. Richard …

AFM nanoindentations show a dependence of penetration, ie, the relative motion between
the sample and the tip (indenter), on material elastic properties when using the same load …

Although atomic force microscopes AFMs have been commercially available for over a
decade, calibration of the stiffness spring constant of the force sensing cantilever has …

This review paper summarizes the European nanometrology landscape from a technical
perspective. Dimensional and chemical nanometrology are discussed first as they underpin …

A method for calibrating the stiffness of atomic force microscope (AFM) cantilevers is
demonstrated using an array of uniform microfabricated reference cantilevers. A series of …

It is now fully appreciated that metrology will play an integral role in the successful
development and commercialization of micro-and nanotechnology. To this end, the UK …

We present and analyze a method to improve the morphology and mechanical properties of
gold thin films for use in optical sensors or other settings where good adhesion of gold to a …