Multi-gas detection represents a suitable solution in many applications, such as
environmental and atmospheric monitoring, chemical reaction and industrial process …

This review aims to discuss the latest advancements in quartz-enhanced photoacoustic
spectroscopy (QEPAS) based trace-gas sensing. Starting from the QEPAS basic physical …

An overview of microelectromechanical systems (MEMS) resonators for frequency reference
and timing applications is presented. The progress made in the past few decades in design …

Recently, remarkable advances have been made in coupling a number of high-Q modes of
nano-mechanical systems to high-finesse optical cavities, with the goal of reaching regimes …

This paper is a review of the remarkable progress that has been made during the past few
decades in design, modeling, and fabrication of micromachined resonators. Although micro …

This article is a review of the dissipation processes in nanoelectromechanical systems
(NEMS). As NEMS technology becomes more and more prevalent in research and …

We study the transverse oscillatory modes of nanomechanical silicon nitride strings under
high tensile stress as a function of geometry and mode index m≤ 9. Reproducing all …

This paper presents high fill-factor piezoelectric micromachined ultrasonic transducer
(PMUT) arrays fabricated via a novel process using cavity SOI wafers. The simple three …

The temperature dependence of the quality factor of microelectromechanical system
(MEMS) resonators is analyzed and measured. For silicon MEMS resonators, there are …

Graphene is the strongest material ever studied and can be an efficient substitute for silicon.
This six-volume handbook focuses on fabrication methods, nanostructure and atomic …