Micro and nanoelectromechanical systems M/NEMS have been extensively investigated
and exploited in the past few decades for various applications and for probing fundamental …

This paper is a review of the remarkable progress that has been made during the past few
decades in design, modeling, and fabrication of micromachined resonators. Although micro …

Abstract Silicon Microelectromechanical Systems (MEMS) resonators have broad
commercial applications for timing and inertial sensing. However, the performance of MEMS …

Micro/nanoelectromechanical systems (M/NEMS), especially micro/nanomechanical
resonators, provide an unprecedented platform for investigating a wide range of applications …

In this study, a Thin-film Piezoelectric-on-Silicon (TPoS) MEMS oscillator is successfully
demonstrated that uses lead zirconate titanate (PZT) thin-film piezoelectric layer deposited …

In this work, we determine the intrinsic mechanical energy dissipation limit for single-crystal
resonators due to anharmonic phonon-phonon scattering in the Akhiezer (Ω τ≪ 1) regime …

Owning a superior quality factor (Q) helps contribute to the advantages of
microelectromechanical systems (MEMS) resonators due to its impact on the performance of …

This paper reports a low phase noise 10 MHz oscillator based on a lateral-extensional mode
thin-film piezoelectric-on-silicon (TPoS) resonator. A novel design of interdigital electrodes is …

This paper presents an anchor quality factor boosted thin-film Aluminum Nitride-On-Silicon
length extensional mode microelectromechanical systems (MEMS) resonator supported by …

A piezoelectrically actuated high quality factor (Q) mechanically coupled Lamé mode
resonator based on a thin-film piezoelectric-on-silicon (TPoS) platform is demonstrated. The …