Silicon wafers and transparent glass plates are major components in the semiconductor
industry. In semiconductor devices, the surface shape and optical thickness of the wafers …

The difficulty in multi-surface measurements comes from that each measured surface
contributes harmonics to the fringe patterns, and the wavelength-shifting technique is an …

Fringe analysis using phase modulation through wavelength scanning is extensively utilized
for profiling the surface and thickness variation of glass plates. However, the nonlinearity of …

Phase-calculation formula, involving a window and Fourier transform term, have been used
for decades to profile the shape of sample surfaces. Windows can be designed using the …

In this study, a 6N–5 phase shifting algorithm comprising a polynomial window function and
discrete Fourier transform is developed for the simultaneous measurement of the surface …

In phase-shifting Fizeau interferometers, the phase-shift error and multiple-beam
interference are the most common sources of systematic error affecting high-precision phase …

In this study, we propose a 6N–3 algorithm for suppressing the Zernike piston phase error by
expanding 6N–5 algorithm using algorithmic polynomial theory. We demonstrate that the …

The application of wavelength-tuning interferometric techniques is vital in addressing
measurement complexities related to surface profile errors in transparent parallel plates due …

Phase-shifting fringe analysis using wavelength scanning has been broadly applied to the
interferometric profiling of the thickness variation of glass plates. However, the nonlinear …

Some advances in fringe analysis technology for phase computing are presented. A full
scheme for phase evaluation, applicable to automatic applications, is proposed. The …