With the fast development of the fifth-generation cellular network technology (5G), the future
sensors and microelectromechanical systems (MEMS)/nanoelectromechanical systems …

In this paper, we review a recent technology development based on coupled MEMS
resonators that has the potential of fundamentally transforming MEMS resonant sensors …

This paper is a review of the remarkable progress that has been made during the past few
decades in design, modeling, and fabrication of micromachined resonators. Although micro …

This paper introduces a differential vibrating beam MEMS accelerometer demonstrating
excellent long-term stability for applications in gravimetry and seismology. The MEMS …

This paper reports an acceleration sensing method based on two weakly coupled
resonators (WCRs) using the phenomenon of mode localization. When acceleration acts on …

With increasing demands for wireless sensing nodes for assets control and condition
monitoring; needs for alternatives to expensive conventional accelerometers in vibration …

This review provides a comprehensive survey of noise research in MEMS. Some
background on noise and on MEMS is provided. We review noise production mechanisms …

We report on the characterization of a high-resolution micromachined resonant
accelerometer fabricated in an SoI-microelectromechanical (MEMS) foundry process. A …

A new micromachined uniaxial silicon resonant accelerometer characterized by a high
sensitivity and very small dimensions is presented. The device's working principle is based …

In this paper, we present a silicon carbide MEMS resonant strain sensor for harsh
environment applications. The sensor is a balanced-mass double-ended tuning fork …