Demonstration of ultra-thin buried oxide germanium-on-insulator MOSFETs by direct wafer bonding and polishing techniques

Z Zheng, X Yu, M Xie, R Cheng, R Zhang… - Applied Physics …, 2016 - pubs.aip.org
The ultra-thin body and ultra-thin buried-oxide (UTBB) Germanium-on-Insulator (GeOI)
substrates have been fabricated by direct wafer bonding and polishing techniques. The Ge …

Fabrication and characterization of ferroelectric junctionless GOI and GeSnOI transistors for low-power applications

Y Ren, J Ke, H Lin, X Zhao, Z Kong, R Liang… - Journal of Materials …, 2025 - Springer
Ge and GeSn materials have garnered significant attention due to their high carrier mobility
and tunable band structure, making them promising candidates for low-power electronic …

Fabrication of a high-performance Ge/Si PIN photodetector utilizing Ge/Si hetero-bonding with a microcrystalline Ge interlayer

J Li, W Meng, Z Wang, X Jiang, M Guo, Z Huang… - Optics …, 2024 - opg.optica.org
We present a high-performance Ge/Si PIN photodetector that leverages the advanced Ge/Si
hetero-bonding method. The sputtered microcrystalline Ge is utilized as the interlayer, in …

Dual operation modes of the Ge Schottky barrier metal–oxide–semiconductor field-effect transistor

D Lidsky, CR Allemang, T Hutchins-Delgado… - Applied Physics …, 2024 - pubs.aip.org
A germanium p-channel Schottky barrier metal–oxide–semiconductor field-effect transistor
(SB-MOSFET) with germanium–platinum Schottky contacts is demonstrated experimentally …

Fabrication of high-hole-mobility germanium-on-insulator wafers through an easy method

K Yu, F Yang, H Cong, L Zhou, Q Liu, L Zhang… - Journal of Alloys and …, 2018 - Elsevier
In this work, an easy method for fabricating germanium on insulator (GeOI) was
demonstrated through epitaxy process (the growth of Ge on silicon wafer) …

Low-temperature fabrication of wafer-bonded Ge/Si pin photodiodes by layer exfoliation and nanosecond-pulse laser annealing

S Ke, Y Ye, J Wu, D Liang, B Cheng, Z Li… - … on Electron Devices, 2019 - ieeexplore.ieee.org
We report a potential method for the fabrication of Si-based Ge film with low threading
dislocation (TD) density (<; 10 5 cm-2) based on a low-temperature Ge/Si wafer bonding and …

Spectroscopic study of nitrogen incorporation in Ge, Sb, and Te elemental systems: A step toward the understanding of nitrogen effect in phase-change materials

L Prazakova, E Nolot, E Martinez, D Rouchon… - Journal of Applied …, 2022 - pubs.aip.org
Nitrogen doping in chalcogenide materials represents a promising way for the improvement
of material properties. Indeed, N doping in GeSbTe phase-change alloys have …

Electrical properties of ultra-thin body (111) Ge-On-Insulator n-channel MOSFETs fabricated by smart-cut process

CM Lim, Z Zhao, K Sumita… - IEEE Journal of the …, 2021 - ieeexplore.ieee.org
We have systematically examined electrical characteristics of ultra-thin body (UTB)(111) Ge-
on-insulator (GOI) n-channel metal-oxide-semiconductor field-effect transistors (nMOSFETs) …

Impact of multi-domain effect on the effective carrier mobility of ferroelectric field-effect transistor

FN Liu, YY Zhang, Y Peng, WW Xiao, GQ Han… - …, 2023 - iopscience.iop.org
HfO 2-based ferroelectric field-effect transistors (FeFETs) are a promising candidate for
multilevel memory manipulation and brain-like computing due to the multi-domain properties …

Electron Mobility Enhancement of (111)-Oriented Extremely Thin Body Ge-on-Insulator nMOSFETs by Flipped Smart-Cut Substrates

X Han, CT Chen, K Sumita… - … on Electron Devices, 2024 - ieeexplore.ieee.org
The effectiveness of (111)-oriented substrates with a flipped method, in which layer transfer
is performed again after the Smart-Cut process, has been proven to significantly enhance …