CMOS Scaling for the 5 nm Node and Beyond: Device, Process and Technology

HH Radamson, Y Miao, Z Zhou, Z Wu, Z Kong, J Gao… - Nanomaterials, 2024 - mdpi.com
After more than five decades, Moore's Law for transistors is approaching the end of the
international technology roadmap of semiconductors (ITRS). The fate of complementary …

Scalable fabrication of self-assembled GeSn vertical nanowires for nanophotonic applications

G Lin, Y An, H Ding, H Zhao, J Wang, S Chen, C Li… - …, 2023 - degruyter.com
In this work, scalable fabrication of self-assembled GeSn vertical nanowires (NWs) based on
rapid thermal annealing (RTA) and inductively coupled-plasma (ICP) dry etching was …

Improving the short-wave infrared response of strained GeSn/Ge multiple quantum wells by rapid thermal annealing

H Zhao, G Lin, C Han, R Hickey, T Zhama, P Cui… - Vacuum, 2023 - Elsevier
In this work, the evolution of structural, optical and optoelectronic properties of coherently
strained Ge 0.883 Sn 0.117/Ge multiple quantum wells (MQWs) grown by molecular beam …

Composition and strain effects on Raman vibrational modes of GeSn alloys with Sn contents up to 31% grown by low-temperature molecular beam epitaxy

H Zhao, G Lin, Y Zhang, S Park, R Hickey, T Zhama… - Optical Materials, 2024 - Elsevier
We study the behavior of Ge–Ge, Ge–Sn, and Sn–Sn vibrational modes in GeSn
semiconductors with Raman Spectroscopy. Raman spectroscopy is a rapid, nanoscale …

Transferable GeSn ribbon photodetectors for high-speed short-wave infrared photonic applications

H Zhao, S Park, G Lin, Y Zhang, T Zhama… - Journal of Vacuum …, 2024 - pubs.aip.org
We experimentally demonstrate a low-cost transfer process of GeSn ribbons to insulating
substrates for short-wave infrared (SWIR) sensing/imaging applications. By releasing the …

Structural changes in Ge1-xSnx and Si1-x-yGeySnx thin films on SOI substrates treated by pulse laser annealing

O Steuer, D Schwarz, M Oehme, F Bärwolf… - arXiv preprint arXiv …, 2024 - arxiv.org
Ge1-xSnx and Si1-x-yGeySnx alloys are promising materials for future opto-and
nanoelectronics applications. These alloys enable effective band-gap engineering, broad …

Fabrication, characterization and application of Si₁₋ ₓ₋ ᵧGeₓSnᵧ alloys

O Steuer - 2024 - tud.qucosa.de
Abstract (EN) Within the framework of this thesis, the influence of non equilibrium post
growth thermal treatments of ion implanted and epitaxially grown Ge1-xSnx and Si1-x …

[引用][C] Fabrication, characterization and application of Si1-x-yGexSny alloys

BDS Prucnal, Y Georgiev, GPDG Cuniberti, M Helm