A novel MEMS capacitive microphone with semiconstrained diaphragm supported with center and peripheral backplate protrusions
Audio applications such as mobile phones, hearing aids, true wireless stereo earphones,
and Internet of Things devices demand small size, high performance, and reduced cost …
and Internet of Things devices demand small size, high performance, and reduced cost …
Design and modeling of a MEMS dual-backplate capacitive microphone with spring-supported diaphragm for mobile device applications
NN Peña-García, LA Aguilera-Cortés… - Sensors, 2018 - mdpi.com
New mobile devices need microphones with a small size, low noise level, reduced cost and
high stability respect to variations of temperature and humidity. These characteristics can be …
high stability respect to variations of temperature and humidity. These characteristics can be …
Design and Analysis of High Sensitivity MEMS Microphone
J Abraham, H Sanjeev, K Nisarga - … in Micro and Nano Manufacturing and …, 2022 - Springer
This paper presents the design details of MEMS condenser microphone and increasing the
sensitivity of it by incorporating slots in the diaphragm. The proposed microphone bears a …
sensitivity of it by incorporating slots in the diaphragm. The proposed microphone bears a …
Wafer-Level-Based Open-Circuit Sensitivity Model from Theoretical ALEM and Empirical OSCM Parameters for a Capacitive MEMS Acoustic Sensor
We present a simple, accurate open-circuit sensitivity model based on both analytically
calculated lumped and empirically extracted lumped-parameters that enables a capacitive …
calculated lumped and empirically extracted lumped-parameters that enables a capacitive …
[PDF][PDF] II; Johnson, JTMG; da Silva, M.; Pedersen, M. A Novel MEMS Capacitive Microphone with Semiconstrained Diaphragm Supported with Center and Peripheral …
S Shubham, Y Seo, V Naderyan, X Song, AJ Frank - 2021 - academia.edu
Audio applications such as mobile phones, hearing aids, true wireless stereo earphones,
and Internet of Things devices demand small size, high performance, and reduced cost …
and Internet of Things devices demand small size, high performance, and reduced cost …