A review of piezoelectric MEMS sensors and actuators for gas detection application
Piezoelectric microelectromechanical system (piezo-MEMS)-based mass sensors including
the piezoelectric microcantilevers, surface acoustic waves (SAW), quartz crystal …
the piezoelectric microcantilevers, surface acoustic waves (SAW), quartz crystal …
Enhanced Electrothermal Analysis for Acetone Gas Detection Based on PolyMUMPs MEMS Sensor
Environmental monitoring for the detection and regulation of toxic gases is of paramount
importance. This study proposes the modeling and fabrication of MEMS devices based on …
importance. This study proposes the modeling and fabrication of MEMS devices based on …
Dynamics of a piezoelectric MEMS gas sensor based on coupled micromachined resonators
Z Fang, S Theodossiades, F Dejene… - 2023 IEEE 22nd …, 2023 - ieeexplore.ieee.org
This work discusses the dynamics of MEMS structures; including a single cantilever, a single
clamped-clamped beam, and a mechanically coupled cantilever and bridge resonator; …
clamped-clamped beam, and a mechanically coupled cantilever and bridge resonator; …