This paper is a review of the remarkable progress that has been made during the past few
decades in design, modeling, and fabrication of micromachined resonators. Although micro …

Integrated sensors and actuators are rapidly evolving to provide an important link between
very large scale integrated circuits and nonelectronic monitoring and control applications …

The theory of damping is discussed in Newton's Principia and has been tested in objects as
diverse as the Foucault pendulum, the mirrors in gravitational-wave detectors and …

Micromachining and micro-electromechanical system (MEMS) technologies can be used to
produce complex structures, devices and systems on the scale of micrometers. Initially …

Interdigitated finger (comb) structures are demonstrated to be effective for exciting
electrostatically the resonance of polysilicon microstructures parallel to the plane of the …

IC-compatible microelectromechanical intermediate frequency filters using integrated
resonators with Q's in the thousands to achieve filter Q's in the hundreds have been …

This book on mechanical microsensors is based on a course organized by the Swiss
Foundation for Research in Microtechnology (FSRM) in Neuchatel, Swit zerland, and …

Polycrystalline Silicon for Integrated Circuits and Displays, Second Edition presents much of
the available knowledge about polysilicon. It represents an effort to interrelate the …

A completely monolithic high-Q oscillator, fabricated via a combined CMOS plus surface
micromachining technology, is described, for which the oscillation frequency is controlled by …

This paper investigates, the electrostatic drive and sense of polysilicon resonators parallel to
the substrate, using an interdigitated capacitor (electrostatic comb). Three experimental …