Enhancement in broadband and quasi-omnidirectional antireflection of nanopillar arrays by ion milling

Z Huang, MM Hawkeye, MJ Brett - Nanotechnology, 2012 - iopscience.iop.org
A new technique is developed to fabricate biomimetic antireflection coatings (ARCs). This
technique combines a bottom-up fabrication approach (glancing angle deposition, or GLAD) …

Characterization of growth behavior and structural properties of TiO2 thin films grown on Si (1 0 0) and Si (1 1 1) substrates

CK Jung, SB Lee, JH Boo, SJ Ku, KS Yu… - Surface and Coatings …, 2003 - Elsevier
To comparative study on the growth behavior and structural properties of thin films, in this
work, we have deposited the titanium oxide (TiO2) thin films on both Si (100) and Si (111) …

Metal oxide morphology in argon-assisted glancing angle deposition

JB Sorge, MT Taschuk, NG Wakefield, JC Sit… - Journal of Vacuum …, 2012 - pubs.aip.org
Glancing angle deposition (GLAD) is a thin film deposition technique capable of fabricating
columnar architectures such as posts, helices, and chevrons with control over nanoscale film …

Effect of O2 pressure on the synthesis of titanium oxide film by ion beam enhanced deposition

X Wang, F Zhang, Z Zheng, C Li, L Chen, H Wang… - Materials Letters, 2000 - Elsevier
A series of titanium oxide films have been synthesized on silicon wafers by ion beam
enhanced deposition at different O2 pressures. X-ray Photoelectron Spectroscopy (XPS), X …

Effective principal refractive indices and column angles for periodic stacks of thin birefringent films

I Hodgkinson, QH Wu - JOSA A, 1993 - opg.optica.org
An effective medium theory is developed for periodic stacks of thin films A and B, one or both
of which may be birefringent because of an effect such as columnar microstructure. The …

Film morphology modification in ion-assisted glancing angle deposition

JB Sorge, MJ Brett - Thin Solid Films, 2010 - Elsevier
Porous structured films grown with the glancing angle deposition technique have been
widely studied for thin film optical device applications. We report the use of ion assistance to …

Guided wave techniques for the characterization of optical coatings

F Flory - Thin Films for Optical Systems, 1995 - books.google.com
" Why Are Optical Coatings So Awkward?" was the title of a private conference AH Macleod
gave a few years ago. Indeed, optical properties appear to be more complex and …

Ion beam assisted deposition of ZrO2 thin films

K Neubeck, R Nitsche, H Hahn, L Alberts… - Nuclear Instruments and …, 1995 - Elsevier
Microstructure and properties or thin films can be modified by ion beam irradiation during
growth. The stoichiometry, density, crystallinity, and texture of ZrO2 films deposited under ion …

Interpreting anisotropy and disturbances of optical properties of thin films in terms of layer microstructure

F Flory, JP Borgogno, D Endelema… - Optical Interference …, 1994 - spiedigitallibrary.org
Consequences of the columnar microstructure of dielectric thin films deposited by
conventional vacuum evaporation are discussed. A model associated with the columns is …

Optical waveguide characterization of thin films

F Flory, H Rigneault, J Massaneda… - The Review of Laser …, 1996 - jstage.jst.go.jp
Guided wave techniques are powerful to study the properties of different optical coatings.
The latest results are presented to illustrate the interest of these techniques: the dependence …