Germanium silicon heterostructure photodetectors
G Masini, LC Gunn III, G Capellini - US Patent 7,397,101, 2008 - Google Patents
(57) ABSTRACT A horizontal germanium silicon heterostructure photodetec tor comprising a
horizontal germaniump-in diode disposed over a horizontal parasitic silicon pin diode uses …
horizontal germaniump-in diode disposed over a horizontal parasitic silicon pin diode uses …
Optoelectronic device with germanium photodetector
Embodiments of the present invention address the above identified need by providing
structures and process integra tion schemes that allow horizontal Ge waveguide photode …
structures and process integra tion schemes that allow horizontal Ge waveguide photode …
Fabricating photonics devices fully integrated into a CMOS manufacturing process
Disclosed are process enhancements to fully integrate the processing of a photonics device
into a CMOS manufacturing process flow. A CMOS wafer may be divided into different …
into a CMOS manufacturing process flow. A CMOS wafer may be divided into different …
Co-integration of photonic devices on a silicon photonics platform
BACKGROUND The realization of a complete silicon based photonics plat form requires the
co-integration of advanced passive photo nic devices, eg, using poly-on-SOI (Such as, for …
co-integration of advanced passive photo nic devices, eg, using poly-on-SOI (Such as, for …
Waveguide photodetector
BACKGROUND The invention relates generally to optical waveguides, and relates more
particularly to waveguide photodetectors for converting optical signals into electrical signals …
particularly to waveguide photodetectors for converting optical signals into electrical signals …
Optical coupling structure
T Keyser, G Hughes - US Patent 7,454,102, 2008 - Google Patents
BACKGROUND Optoelectronic integrated circuits (ICs) include both elec tronic and optical
elements Within a single chip. Typical elec tronic elements include? eld effect transistors …
elements Within a single chip. Typical elec tronic elements include? eld effect transistors …
Vertically-integrated waveguide photodetector apparatus and related coupling methods
174 aSE2 detector are fabricated utilizing methods generally compat ible with CMOS
processing techniques. In various imple mentations, the waveguide consists essentially of …
processing techniques. In various imple mentations, the waveguide consists essentially of …
Integrated waveguide photodetector apparatus with matching propagation constants and related coupling methods
6,856,733 B2* 2/2005 Zheng......................... 385/39 densely integrated With and efficiently
coupled to a photo detector are fabricated utilizing methods generally compat ible With …
coupled to a photo detector are fabricated utilizing methods generally compat ible With …
Waveguide photodetector device and manufacturing method thereof
MR Reshotko, BA Block - US Patent 8,290,325, 2012 - Google Patents
Embodiments of the present invention describe a waveguide based photodetector device
and its methods of fabrication. The waveguide photodetector device comprises a substrate …
and its methods of fabrication. The waveguide photodetector device comprises a substrate …
Design of CMOS integrated germanium photodiodes
The rapid expansion in the use of the Internet has resulted in a demand for high speed
communications links and devices, including optical links and devices. Optical links using …
communications links and devices, including optical links and devices. Optical links using …