Amorphous IGZO TFT with High Mobility of ∼70 cm2/(V s) via Vertical Dimension Control Using PEALD

J Sheng, TH Hong, HM Lee, KR Kim… - … applied materials & …, 2019 - ACS Publications
Amorphous InGaZnO x (a-IGZO) thin-film transistors (TFTs) are currently used in flat-panel
displays due to their beneficial properties. However, the mobility of∼ 10 cm2/(V s) for the a …

Influence of oxygen flow rate on channel width dependent electrical properties of indium gallium zinc oxide thin-film transistors

G Wu, AK Sahoo - Nanomaterials, 2020 - mdpi.com
The effects of various oxygen flows on indium gallium zinc oxide (IGZO) based thin-film
transistors (TFTs) with different channel width sizes have been investigated. The IGZO nano …

The effect of Sn on electrical performance of zinc oxide based thin film transistor

S Ruzgar, M Caglar - Journal of Materials Science: Materials in …, 2019 - Springer
In this study, we have effectively fabricated undoped and Sn-doped zinc oxide thin film
transistors (ZTO TFTs) with the back-gate structure on commercially purchased p-type Si …

RF sputtering deposited a-IGZO films for LCD alignment layer application

GM Wu, CY Liu, AK Sahoo - Applied Surface Science, 2015 - Elsevier
In this paper, amorphous indium gallium zinc oxide (a-IGZO) inorganic films were deposited
at a fixed oblique angle using radio-frequency sputtering on indium tin oxide (ITO) glass as …

Improvement of physical properties of IGZO thin films prepared by excimer laser annealing of sol–gel derived precursor films

CY Tsay, TT Huang - Materials Chemistry and Physics, 2013 - Elsevier
Indium gallium zinc oxide (IGZO) transparent semiconductor thin films were prepared by KrF
excimer laser annealing of sol–gel derived precursor films. Each as-coated film was dried at …

Solution processed amorphous InGaZnO semiconductor thin films and transistors

CY Tsay, TY Yan - Journal of Physics and Chemistry of Solids, 2014 - Elsevier
Amorphous indium gallium zinc oxide (a-IGZO) semiconductor thin films and transistors
were deposited on alkali-free glasses by the sol–gel route. The atomic ratio of In: Ga: Zn in …

Impact of dopant species on the interfacial trap density and mobility in amorphous In-X-Zn-O solution-processed thin-film transistors

M Benwadih, JA Chroboczek, G Ghibaudo… - Journal of Applied …, 2014 - pubs.aip.org
Alloying of In/Zn oxides with various X atoms stabilizes the IXZO structures but generates
electron traps in the compounds, degrading the electron mobility, μ. To assess whether the …

Effect of Ga content and sintering time on electrical properties of InGaZnO thin film transistors fabricated by sol–gel process

JH Choi, SM Hwang, CM Lee, JC Kim, GC Park… - Journal of crystal …, 2011 - Elsevier
We fabricated InGaZnO (IGZO) thin film transistors by the sol–gel method and evaluated the
effects of the Ga content and sintering time on their electrical properties. The IGZO precursor …

Ladder-type silsesquioxane copolymer gate dielectrics for gating solution-processed IGZO field-effect transistors

MJ Kim, YM Heo, JH Cho - Organic Electronics, 2017 - Elsevier
Field-effect transistors (FETs) based on solution-processed indium-gallium-zinc oxide
(IGZO) exhibited excellent electrical properties, including a high carrier mobility over 1 cm …

Hybrid solution processed InGaO 3 (ZnO) m thin films with periodic layered structures and thermoelectric properties

JH Kim, DK Seo, CH Ahn, SW Shin, HH Cho… - Journal of Materials …, 2012 - pubs.rsc.org
Short period superlattices comprising alternating InO2− and GaO+ (ZnO) 2 layers were
fabricated by a simple hybrid solution process and reactive solid-phase epitaxy at high …