A thermal convection based micro-electromechanical accelerometer is a relatively new kind
of acceleration sensor that does not require a solid proof mass, yielding unique benefits like …

Micromachined fluid inertial sensors are an important class of inertial sensors, which mainly
includes thermal accelerometers and fluid gyroscopes, which have now been developed …

Current sensor networks need to be improved and updated to satisfy new essential
requirements of the Internet of Things, where cutting-edge applications will appear. These …

A family of calorimetric wall shear stress microsensors is investigated numerically and
experimentally to determine their static response curves and their capacity to detect …

This paper reports a novel micromachined integrated gyroscope and accelerometer based
on gas thermal expansion. Using gas movement induced by alternating heat expansion in a …

(北京信息科技大学北京市传感器重点实验室, 北京100101) 摘要: 该文揭示了一种动热源摆式单
轴微机电系统(MEMS) 热加速度计的敏感机理. 在给出敏感结构原理的基础上 …

In this paper, a new 3-axis micromachined convective accelerometer is designed using
restrictions of both 0.35 µm CMOS technology and front-side bulk micromachining (FSBM) …

Errors compensation of micromachined-inertial-measurement-units (MIMU) is essential in
practical applications. This paper presents a new compensation method using a neural …

We present an ambient temperature compensation method for micro thermal convective
accelerometers (MTCA) to improve the performance of temperature drift of sensitivity (TDS) …

An improved dual axis thermal accelerometer is proposed in this paper. The thermal
accelerometer consists of a centrally placed micro-heater, temperature detectors (placed …