Bulk silicon etching techniques, used to selectively remove silicon from substrates, have
been broadly applied in the fabrication of micromachined sensors, actuators, and structures …

Novel miniature fuel cells were fabricated from micromachined silicon wafers. The cells used
methanol and air as reactants, and a thin polymer electrolyte as separator. The assembled …

Recently, TMAH has been widely studied due to its MOS compatibility, nontoxic, and good
anisotropic etching characteristics. In this work, TMAH etching of Si was carried out at …

In this communication, the gravimetric sensitivities of two geometrically different
microfabricated beam structures are reported. Each was loaded serially with gold followed …

Various microfluidic components and their characteristics, along with the demonstration of
two recent achievements of lab-on-chip systems are reviewed and discussed. Many …

The possibility of using sputtered metals as mask materials for deep anisotropic alkaline
etching in silicon was investigated. Sputtered films of chrome, nickel and tungsten were all …

The possibility of using sputtered metals as mask materials for deep anisotropic chemical
etching in silicon was investigated. Sputtered films of chrome, nickel and tungsten were all …

En la presente tesis se han investigado métodos y dispositivos con el objetivo de construir
prototipos útiles que permitan medir de forma distribuida variables de interés biomédico, en …

Chemical microsensors are a new field integrating chemical thin film technology with solid-
state fabrication techniques to make devices capable of detecting chemicals in the …

Recently, microfabrication has been emerging as an ideal technology for the miniaturization
of chemical systems because of its well proven cost-effectiveness, reproducibility, and …