[PDF][PDF] MEMS-based Tunable Optical Filter Arrays for Nano-Spectrometer in the Visible Spectral Range

O Setyawati - 2012 - kobra.uni-kassel.de
Tunable Fabry Pérot filter arrays in a visible spectral range for the implementation in a
nanospectrometer are investigated. The aim of this work is to fabricate tunable filter arrays …

Characterization of dry etching of TiO2/SiO2 distributed Bragg reflectors for tunable optical sensor arrays

O Setyawati, M Engenhorst, M Bartels… - Journal of Micro …, 2010 - spiedigitallibrary.org
We present the characterization of a dry-etching process for high-contrast TiO2/SiO2
distributed Bragg reflectors, by inductively coupled plasma reactive ion etching, focusing on …

Nanoscale printing technique and its applications in nanophotonics

H Wang, L Wen, X Hu, Y Yu, Y Zhao, Q Chen - Nano, 2016 - World Scientific
“Printing” is an ancient technique for recording and publishing. Recently, this technique has
extended its activities down to a nanometer scale. In this paper, we review the progress of …

[PDF][PDF] High resolution 3D nanoimprint technology

X Wang - Doktorarbeit, Universität Kassel, Kassel, 2011 - scholar.archive.org
Optical spectroscopy is a very important sensing technique and reveals a high potential for
numerous applications in both industrial and scientific applications. Low-cost, strongly …

Self-aligned molding technology (SAMT) for fabrication of 3D structures with a foldable imprint mold

M Smolarczyk, L Jablonka, S Reuter, H Hillmer - Applied Nanoscience, 2019 - Springer
We propose self-aligned molding technology (SAMT) as a novel nanoimprint technique with
a self-aligned foldable imprint mold to control size and shape of structures and particles for a …

Déflecteur en polymères électro-optiques en vue de la réalisation d'un convertisseur analogique-numérique tout-optique de signaux hyperfréquences à 40 Géch/s

M Hadjloum - 2016 - hal.science
Dans les systèmes de communication ultra-rapide, comme les systèmes de guerre
électronique et les satellites larges bandes, on souhaite effectuer le maximum de traitement …

[PDF][PDF] 3D nanoimprint technology for NIR Fabry-Pérot filter arrays

DT Nguyen - 2016 - kobra.uni-kassel.de
The fabrication of miniaturized NIR spectrometers based on arrays of multiple Fabry-Pérot
(FP) filter are reported within this thesis work. Today, the low-cost patterning of …

[引用][C] Entwicklung eines Nanoimprint-Prozesses zur Herstellung von dreidimensional strukturierten Nanopartikeln mit erhöhter mechanischer Stabilität

S Reuter - 2019

[引用][C] Optical sensor array based Nanospectrometer: Fabrication of high resolution 3D

MI Hafiz - relation