[HTML][HTML] Super-resolution surface slope metrology of x-ray mirrors
VV Yashchuk, S Rochester, I Lacey… - Review of Scientific …, 2020 - pubs.aip.org
We present experimental, analytical, and numerical methods developed for reconstruction
(deconvolution) of one-dimensional (1D) surface slope profiles over the spatial frequency …
(deconvolution) of one-dimensional (1D) surface slope profiles over the spatial frequency …
Binary pseudo-random array standards for calibration of 3D optical surface profilers used for metrology with aspheric x-ray optics
K Munechika, W Chao, S Dhuey, I Lacey… - Interferometry …, 2022 - spiedigitallibrary.org
High-accuracy surface metrology is vitally important in manufacturing ultra-high-quality free-
form mirrors designed to manipulate x-ray light with nanometer-scale wavelengths. The …
form mirrors designed to manipulate x-ray light with nanometer-scale wavelengths. The …
Binary pseudo-random array test standard optimized for characterization of interferometric microscopes
K Munechika, S Cabrini, W Chao… - … Optical Metrology IV, 2021 - spiedigitallibrary.org
We describe a technique for measuring the instrument transfer function (ITF) of an
interferometric microscope, allowing both characterization and data processing to increase …
interferometric microscope, allowing both characterization and data processing to increase …
Reliability investigation of the instrument transfer function calibration technique based on binary pseudo-random array standards
VV Yashchuk, K Munechika… - Advances in X-Ray …, 2022 - spiedigitallibrary.org
The reliability of the instrument transfer function (ITF) calibration technique based on binary
pseudo-random array (BPRA) standards is investigated and demonstrated in application to …
pseudo-random array (BPRA) standards is investigated and demonstrated in application to …
Metrology
B Bunday, G Orji - … IEEE International Roadmap for Devices and …, 2021 - ieeexplore.ieee.org
The Metrology Chapter identifies emerging measurement challenges from devices, systems,
and integration of new materials in the semiconductor industry and describes research and …
and integration of new materials in the semiconductor industry and describes research and …
Characterization and operation optimization of large aperture optical interferometers using binary pseudorandom array test standards
VV Yashchuk, S Babin, S Cabrini… - Interferometry …, 2018 - spiedigitallibrary.org
Recently, a technique for calibration of the Modulation Transfer Function (MTF) of a broad
variety of metrology instrumentation has been established. The technique is based on test …
variety of metrology instrumentation has been established. The technique is based on test …
DEVICES AND SYSTEMS™
LER LER - irds.ieee.org
Key dimensions and process control parameters from the IRDS More Moore technology
tables, relevant to patterning, are listed in Table 1. Line-edge roughness (LER) or line-width …
tables, relevant to patterning, are listed in Table 1. Line-edge roughness (LER) or line-width …
[图书][B] A Compact, Ultrastable, Operando X-ray Ptychography Microscope at the Advanced Light Source
K Nowrouzi - 2019 - search.proquest.com
X-ray imaging traces its roots back to the discovery of x-rays by Ro ̈ntgen in 1901, in the
form of simple projection imaging. Several decades later, fabrication of x-ray optics enabled …
form of simple projection imaging. Several decades later, fabrication of x-ray optics enabled …