Silicon compound nanomaterials: Exploring emission mechanisms and photobiological applications
After the first visible photoluminescence (PL) from porous silicon (pSi), continuous efforts are
made to fabricate Si‐based compound nanomaterials embedded in matrices such as oxide …
made to fabricate Si‐based compound nanomaterials embedded in matrices such as oxide …
Origin of visible photoluminescence from Si-rich and N-rich silicon nitride films
Abstract Si-rich (SiN 1.1) and N-rich (SiN 1.5) silicon nitride films were grown on the Si
wafers by plasma-enhanced chemical vapor deposition. Their composition and structure …
wafers by plasma-enhanced chemical vapor deposition. Their composition and structure …
Modification of light emission in si-rich silicon nitride films versus stoichiometry and excitation light energy
T Torchynska, L Khomenkova, A Slaoui - Journal of Electronic Materials, 2018 - Springer
Si-rich SiN x films with different stoichiometry were grown on Si substrate by plasma-
enhanced chemical vapor deposition. The Si content was varied by changing the NH 3/SiH …
enhanced chemical vapor deposition. The Si content was varied by changing the NH 3/SiH …
Characterization of N Rich-Silicon Nitride Thin Films Deposited by PECVD
I Guler - ECS Journal of Solid State Science and Technology, 2023 - iopscience.iop.org
Silicon nitride thin films are very important for their possible use in semiconductor industry
and electronic applications. Changing the deposition parameters, silicon nitrides which have …
and electronic applications. Changing the deposition parameters, silicon nitrides which have …
Photoluminescence from silicon nanocrystals embedded in silicon nitride fabricated by low-pressure chemical vapor deposition followed by high-temperature …
N Hafsi, H Bouridah, MR Beghoul… - Journal of Applied …, 2015 - pubs.aip.org
The photoluminescence (PL) from silicon nanocrystals (Si-ncs) embedded in an amorphous
silicon nitride matrix was examined both experimentally and through theoretical simulations …
silicon nitride matrix was examined both experimentally and through theoretical simulations …
Photoluminescence and carrier transport mechanisms of silicon-rich silicon nitride light emitting device
Silicon-rich silicon nitride (SRSN) films were prepared on p-type silicon substrates using
plasma-enhanced chemical vapor deposition (PECVD). Small size (∼ 3 nm) amorphous …
plasma-enhanced chemical vapor deposition (PECVD). Small size (∼ 3 nm) amorphous …
Raman study of light-emitting SiNx films grown on Si by low-pressure chemical vapor deposition
Si-rich silicon nitride (SRSN) films were deposited on Si wafers by low pressure chemical
vapor deposition (LPCVD) technique and, subsequently, annealed at (800–1200)° C to form …
vapor deposition (LPCVD) technique and, subsequently, annealed at (800–1200)° C to form …
Self-assembled nc-Si/a-SiNx: H quantum dots thin films: An alternative solid-state light emitting material
Nanocrystalline silicon quantum dots (QDs) of varying size from~ 5.4 to 2.2 nm embedded in
amorphous silicon-nitride matrix (nc-Si-QDs/a-SiN x: H) were prepared via ICP-CVD (13.56 …
amorphous silicon-nitride matrix (nc-Si-QDs/a-SiN x: H) were prepared via ICP-CVD (13.56 …
Effect of hydrogen ion beam treatment on Si nanocrystal/SiO2 superlattice-based memory devices
SW Fu, HJ Chen, HT Wu, BR Chuang, CF Shih - Applied Surface Science, 2016 - Elsevier
This study presents a novel route for synthesizing silicon-rich oxide (SRO)/SiO 2 superlattice-
based memory devices with an improved memory window and retention properties. The SiO …
based memory devices with an improved memory window and retention properties. The SiO …
Combined study of the effect of deposition temperature and post-deposition annealing on the photoluminescence of silicon quantum dots embedded in chlorinated …
MA Serrano-Núñez, A Rodríguez-Gómez… - RSC …, 2016 - pubs.rsc.org
Chlorinated-silicon nitride (SiNx: Cl) thin films with embedded silicon quantum dots (Si-QDs)
were grown by remote plasma enhanced chemical vapor deposition using SiH2Cl2, H2 …
were grown by remote plasma enhanced chemical vapor deposition using SiH2Cl2, H2 …