Nanoindentation has emerged as an important method for the evaluation of the mechanical
response of small material volumes and thin films to applied loading. Here, we present a …

Measurements related to nano-and micro-scale science, technology, and manufacturing are
pushing the limits of detectable mechanical, electrical, and chemical quantities to ever …

The basis of the virtual machine concept, which is commonly used in coordinate measuring
machines, was implemented to determine more realistic uncertainties on the estimation of …

Instrumented indentation is a technique used for measuring the mechanical response of
materials to deformation. The accuracy of these measurements relies on force and …

A traceable micro-force sensor capable of measuring forces in the range of micronewtons to
millinewtons was developed. This sensor consists of a pair of parallel electrodes to provide …