[HTML][HTML] A review: Laser interference lithography for diffraction gratings and their applications in encoders and spectrometers

L Luo, S Shan, X Li - Sensors, 2024 - mdpi.com
The unique diffractive properties of gratings have made them essential in a wide range of
applications, including spectral analysis, precision measurement, optical data storage, laser …

[HTML][HTML] High-Precision Chromatic Confocal Technologies: A Review

J Li, R Ma, J Bai - Micromachines, 2024 - mdpi.com
Chromatic confocal technology is widely used for precise, steady, and efficient displacement
measurement in many industrial fields. It employs the confocal and dispersion principles to …

A Review: High-Precision Angle Measurement Technologies

S Wang, R Ma, F Cao, L Luo, X Li - Sensors, 2024 - mdpi.com
Angle measurement is an essential component of precision measurement and serves as a
crucial prerequisite for high-end manufacturing. It guides the implementation of precision …

Planar Two-Dimensional Capacitive Displacement Sensor Based on Time Grating

K Peng, Z Deng, X Liu, H Wang… - IEEE Transactions on …, 2023 - ieeexplore.ieee.org
Efforts to meet the demand for planar 2-D displacement measurement systems are limited by
the difficulties of manufacturing 2-D diffraction gratings with high precision over a large area …

Compact magneto-optical traps using planar optics

Z Tan, B Lu, C Han, C Lee - Chinese Physics B, 2024 - iopscience.iop.org
Magneto-optical traps (MOTs) composed of magnetic fields and light fields have been widely
utilized to cool and confine microscopic particles. Practical technology applications require …

Multi-functional dual-path self-aligned polarization interference lithography

J Song, B Liu, X Shan, F Wang, X Zhong - Optics Express, 2023 - opg.optica.org
Manufacturing sharp features is one of the most desired requirements for lithography. Here,
we demonstrate a dual-path self-aligned polarization interference lithography (Dp-SAP IL) …

[HTML][HTML] A Review of Optical Interferometry for High-Precision Length Measurement

G Huang, C Cui, X Lei, Q Li, S Yan, X Li… - …, 2024 - pmc.ncbi.nlm.nih.gov
Optical interferometry has emerged as a cornerstone technology for high-precision length
measurement, offering unparalleled accuracy in various scientific and industrial …

达曼光栅50 年: 历史演进与新机遇

余俊杰, 郑奉禄, 张瑾, 吴志伟, 周常河 - Chinese Journal of …, 2024 - opticsjournal.net
摘要本文简要介绍了达曼光栅的相关原理及理论, 并从历史演化发展脉络出发,
梳理了达曼光栅在50 余年发展历程中的标志性进展与代表性成果, 同时简略介绍了达曼光栅在 …

High dynamic wavefront stability control for high-uniformity periodic microstructure fabrication

Z Zhong, J Li, T Lu, X Li - Precision Engineering, 2025 - Elsevier
Periodic microstructures are widely used in optical communication, sensing, and imaging
systems for their superior performance in optical modulation. Among their fabrication …

High working distance and six-degree-of-freedom grating encoder based on lens batch collimation

L Luo, F Cao, Y Wang, S Wang - Optoelectronic Devices and …, 2024 - spiedigitallibrary.org
In order to solve a series of application problems caused by the difficulty of adjusting prism
collimation and the short working distance of small period gratings in current collimation …