Electric signals measured during plasma thin-film etching and their connection to the electron concentration and the properties of the treated surface
P Dvořák, R Žemlička, R Přibyl… - … Sources Science and …, 2022 - iopscience.iop.org
The electric characteristics of a discharge are usually changed when a thin film is deposited
on or etched from a discharge electrode or a substrate. The electric characteristics include …
on or etched from a discharge electrode or a substrate. The electric characteristics include …
Probe technique for measurement of a plasma potential waveform
P Dvořák, M Tkáčik, J Bém - Plasma Sources Science and …, 2017 - iopscience.iop.org
A method for the measurement of plasma potential waveforms is presented that is based on
measurement with a high-impedance probe and an electric model of the sheath around the …
measurement with a high-impedance probe and an electric model of the sheath around the …