Silicon-ceramic composite substrate: a promising RF platform for heterogeneous integration

M Fischer, S Gropp, J Stegner, A Frank… - IEEE Microwave …, 2019 - ieeexplore.ieee.org
The starting point for integrating RF functions in silicon (Si) and low-temperature cofired
multilayers with an Si-ceramic (SiCer) composite substrate was the need for cross-sectional …

Compact low phase-noise MEMS-based RF oscillator on a dedicated silicon-ceramic composite substrate

J Stegner, M Fischer, S Gropp… - 2016 46th European …, 2016 - ieeexplore.ieee.org
Over the last few years, a unique silicon-ceramic composite substrate technology has been
developed, where a silicon wafer can be directly bonded to a stack of low-temperature co …

MEMS-Based RF Oscillators Using SiCer Technology: New Integration, Packaging, and Assembly Concepts

J Stegner, M Fischer, S Gropp, U Stehr… - IEEE Microwave …, 2019 - ieeexplore.ieee.org
In state-of-the-art RF receiver systems, the number of microelectromechanical systems
(MEMS)-based devices is rapidly rising [1]. MEMS devices and circuits have become …

Multiphysical design of compact RF modules on a silicon-ceramics substrate

U Stehr, J Stegner, M Fischer, S Gropp… - 2018 11th German …, 2018 - ieeexplore.ieee.org
In the upcoming" Beyond Moore" era of technology development, raw transistor scaling
becomes less important to differentiate one design from another. Instead, the incorporation …

Investigations of Metal Systems in a Silicon Ceramic Composite Substrate for Electrical and Thermal Contacts as well as Associated Mounting Aspects

M Fischer, T Welker, B Leistritz… - Additional Papers …, 2016 - meridian.allenpress.com
A quasi-monolithic silicon ceramic composite substrate (SiCer), allowing the advantageous
combination of silicon MEMS technology with the LTCC technology represents a base …

Highly integrated RF-MEMS multi-frequency oscillator on a silicon-ceramic composite substrate

J Stegner, M Fischer, S Gropp, U Stehr… - 2019 IEEE MTT-S …, 2019 - ieeexplore.ieee.org
The ongoing technical need for miniaturisation and the increasing number of wireless
standards and frequency bands implemented in modern radio-frequency (RF) transceiver …

Cross-Hierarchical Design of Compact RF-MEMS Oscillator Circuits on a Silicon-Ceramic Composite Substrate

J Stegner, S Gropp, M Fischer, U Stehr… - … Joint Conference of …, 2019 - ieeexplore.ieee.org
The valuable performance figures of micro-electromechanical systems (MEMS) offer many
improvements in the field of radio-frequency (RF) circuits for mobile communications …

[PDF][PDF] Multiphysikalischer Entwurf hybrid-integrierter MEMS-Oszillatoren auf Silizium-LTCC-Substraten

J Stegner - 2020 - db-thueringen.de
Die vorliegende Arbeit mit den darin enthaltenen Ideen, Methoden, Entwürfen und
Implementierungen entstand während meiner Arbeit als wissenschaftlicher Mitarbeiter im …

Active Cooling Using Fluid Channels in a Silicon-Ceramic Composite Substrate

M Fischer, T Werthes, C Kleinholz… - 2019 22nd European …, 2019 - ieeexplore.ieee.org
The silicon-ceramic composite substrate (SiCer) allows the combination of MEMS and LTCC
technologies in one wafer substrate. The expansion coefficient of the specially developed …