L Xie,
H Zhu, Y Zhang, X Ai, J Li, G Wang,
J Liu, A Du… - ACS …, 2023 - ACS Publications
A special Ge nanowire/nanosheet (NW/NS) p-type vertical sandwich gate-all-around (GAA)
field-effect transistor (FET)(Ge NW/NS pVSAFET) with self-aligned high-κ metal gates …