Piezoelectric actuation<? pag\break?> for integrated photonics
Recent decades have seen significant advancements in integrated photonics, driven by
improvements in nanofabrication technology. This field has been developed from integrated …
improvements in nanofabrication technology. This field has been developed from integrated …
A review of eigenmode and frequency control in piezoelectric MEMS resonators
Piezoelectric microelectromechanical systems (MEMS) resonators possess favorable
properties, such as strong electromechanical coupling, high, and polarized linear …
properties, such as strong electromechanical coupling, high, and polarized linear …
A near spurious-free 6 GHz LLSAW resonator with large electromechanical coupling on X-cut LiNbO3/SiC bilayer substrate
P Liu, S Fu, R Su, H Xu, B Xiao, C Song, F Zeng… - Applied Physics …, 2023 - pubs.aip.org
The fast development of the fifth-generation (5G) wireless systems and substantial growth of
data usage have imposed stringent requirements for high-frequency and wideband radio …
data usage have imposed stringent requirements for high-frequency and wideband radio …
15-ghz epitaxial aln fbars on sic substrates
Epitaxial AlN thin-film bulk acoustic resonators (FBARs) on SiC substrates with first-order
thickness extensional modes of 15-17 GHz are demonstrated. For the 15 GHz epi-AlN …
thickness extensional modes of 15-17 GHz are demonstrated. For the 15 GHz epi-AlN …
Pulsed laser deposition of ZnGa2O4 thin films on Al2O3 and Si substrates for deep optoelectronic devices applications
A Guo, L Zhang, N Cao, T Lu, Y Zhu, D Tian… - Applied Physics …, 2023 - iopscience.iop.org
Due to the ultra-wideband gap, high transmittance in the ultraviolet (UV) region, and
excellent environmental stability, zinc gallium oxide (ZnGa 2 O 4) has attracted considerable …
excellent environmental stability, zinc gallium oxide (ZnGa 2 O 4) has attracted considerable …
Circuit-level modeling and simulation of wireless sensing and energy harvesting with hybrid magnetoelectric antennas for implantable neural devices
D Das, Z Xu, M Nasrollahpour… - IEEE open journal of …, 2023 - ieeexplore.ieee.org
A magnetoelectric antenna (ME) can exhibit the dual capabilities of wireless energy
harvesting and sensing at different frequencies. In this article, a behavioral circuit model for …
harvesting and sensing at different frequencies. In this article, a behavioral circuit model for …
Investigation of thermal annealing on the characteristics of ScxAl1− XN thin films
Good temperature stability is essential for radio-frequency (RF) devices working at high
frequencies. AlN and Sc doped AlN (Sc x Al 1− x N) are widely used as piezoelectric thin …
frequencies. AlN and Sc doped AlN (Sc x Al 1− x N) are widely used as piezoelectric thin …
Development of temperature sensor based on AlN/ScAlN SAW resonators
Temperature monitoring in extreme environments presents new challenges for MEMS
sensors. Since aluminum nitride (AlN)/scandium aluminum nitride (ScAlN)-based surface …
sensors. Since aluminum nitride (AlN)/scandium aluminum nitride (ScAlN)-based surface …
High Quality Epitaxial Piezoelectric and Ferroelectric Wurtzite Al1‐xScxN Thin Films
Piezoelectric and ferroelectric wurtzite are promising to reshape modern microelectronics
because they can be easily integrated with mainstream semiconductor technology. Sc …
because they can be easily integrated with mainstream semiconductor technology. Sc …
Machine-learning of piezoelectric coefficients for wurtzite crystals
ABSTRACT A handful of piezoelectrics cover all of today's technologies, so there is a need
to expand the range of accessible piezoelectric properties to enable future fundamental and …
to expand the range of accessible piezoelectric properties to enable future fundamental and …