Failure detection and primary cause identification of multivariate time series data in semiconductor equipment
M Baek, SB Kim - IEEE Access, 2023 - ieeexplore.ieee.org
Downtime caused by equipment failure is the biggest productivity problem in the 24-hour a
day operations of the semiconductor industry. Although some equipment failures are …
day operations of the semiconductor industry. Although some equipment failures are …
Application of 1D ResNet for Multivariate Fault Detection on Semiconductor Manufacturing Equipment
P Tchatchoua, G Graton, M Ouladsine, JF Christaud - Sensors, 2023 - mdpi.com
Amid the ongoing emphasis on reducing manufacturing costs and enhancing productivity,
one of the crucial objectives when manufacturing is to maintain process tools in optimal …
one of the crucial objectives when manufacturing is to maintain process tools in optimal …
A novel methodology based on long short-term memory stacked autoencoders for unsupervised detection of abnormal working conditions in semiconductor …
The detection of the occurrence of working conditions in semiconductor manufacturing
systems is fundamental to minimize yield losses and enhance production quality. The main …
systems is fundamental to minimize yield losses and enhance production quality. The main …
[HTML][HTML] 상관관계분석및데이터증강을활용한반도체설비고장감지
백민재， 김성범 - Journal of the Korean Institute of Industrial Engineers …, 2024 - jkiie.org
Traditional control charts and machine learning methods have been used to detect
equipment failures in semiconductor processes. However, detecting failures and identifying …
equipment failures in semiconductor processes. However, detecting failures and identifying …