This paper describes integrated multi-axis MEMS capacitive accelerometer by using a set of
vertical and horizontal electrodes. The proposed device has only one silicon proof mass …

In this paper, a three-axis capacitor accelerator has been analyzed, modeled and optimized
using micro-electromechanical systems technology. In the proposed structure, acceleration …

The aim of this work is to show the possibility to realize accelerometers through 3D-printing
technique and to investigate the potentiality of these devices. The feasibility of such …

A new configured 3-axis MEMS capacitive accelerometer is presented in this paper. Single
proof mass is employed to detect acceleration in three directions and acceleration could be …

This paper presents design and sensitivity analysis of a 3D inter-digitated combs and folded
beam structure based MEMS accelerometer. Initially a mathematical model of the …

In this thesis, a closed-loop analog readout circuit for capacitive MEMS accelerometers is
introduced. The detailed analysis of the dynamics of the proposed accelerometer is …

This study has introduced a three-axis capacitive accelerometer, in which the part of the
capacitor that calculates acceleration is installed in the z direction in the spring to improve …

Today micromechanical capacitive accelerometers with comb drive constructions are
intensively developed. A two axis (X and Z) capacitive accelerometer using vertical overlap …

In this paper a three-axis capacitor accelerator has been designed, analyzed and optimized
using micro-electromechanical systems technology. The accelerometers are generally …

In this paper, an accurate front-end CMOS interface circuit for sensing very small
capacitance changes in capacitive sensors is presented. The proposed structure scales …