Selective area doping of GaN toward high-power applications

RA Ferreyra, B Li, S Wang, J Han - Journal of Physics D: Applied …, 2023 - iopscience.iop.org
Selective area doping in GaN, especially p-type, is a critical and inevitable building block for
the realization of advanced device structures for high-power applications, including, but not …

Origination and evolution of point defects in AlN film annealed at high temperature

C Kai, H Zang, J Ben, K Jiang, Z Shi, Y Jia, X Cao… - Journal of …, 2021 - Elsevier
While high temperature annealing has been proven to be an effective strategy to reduce
threading dislocation density of AlN film, the point defect induced near-ultraviolet emission …

Dopant activation process in Mg-implanted GaN studied by monoenergetic positron beam

A Uedono, R Tanaka, S Takashima, K Ueno, M Edo… - Scientific reports, 2021 - nature.com
A process for activating Mg and its relationship with vacancy-type defects in Mg-implanted
GaN were studied by positron annihilation spectroscopy. Mg+ ions were implanted with an …

Operation-induced degradation mechanisms of 275-nm-band AlGaN-based deep-ultraviolet light-emitting diodes fabricated on a sapphire substrate

SF Chichibu, K Nagata, M Oya, T Kasuya… - Applied Physics …, 2023 - pubs.aip.org
Degradation mechanisms of 275-nm-band Al x Ga 1-x N multiple quantum well deep-
ultraviolet light-emitting diodes fabricated on a (0001) sapphire substrate were investigated …

Atomic resolution analysis of extended defects and Mg agglomeration in Mg-ion-implanted GaN and their impacts on acceptor formation

E Kano, K Kataoka, J Uzuhashi, K Chokawa… - Journal of Applied …, 2022 - pubs.aip.org
We carried out atomic-scale observations of Mg-ion-implanted GaN by transmission electron
microscopy (TEM) and atom probe tomography (APT) to clarify the crystallographic …

Effect of Ultra‐High‐Pressure Annealing on Defect Reactions in Ion‐Implanted GaN Studied by Positron Annihilation

A Uedono, H Sakurai, J Uzuhashi, T Narita… - … status solidi (b), 2022 - Wiley Online Library
Herein, the annealing behaviors of defects in ion‐implanted GaN are studied by positron
annihilation, cathodoluminescence, scanning transmission electron microscopy, and atom …

Improved minority carrier lifetime in p-type GaN segments prepared by vacancy-guided redistribution of Mg

K Shima, R Tanaka, S Takashima, K Ueno… - Applied Physics …, 2021 - pubs.aip.org
To accelerate the development of GaN power devices, reproducible fabrication of p-type
GaN (p-GaN) segments by ion-implantation (I/I) that enables selective-area doping is …

[HTML][HTML] p-type conductivity and damage recovery in implanted GaN annealed by rapid gyrotron microwave annealing

V Meyers, E Rocco, TJ Anderson… - Journal of Applied …, 2020 - pubs.aip.org
We demonstrate p-type activation of GaN doped by Mg ion implantation, and in situ during
metalorganic chemical vapor deposition through sequential short-duration gyrotron …

Identification of point defects in multielement compounds and alloys with positron annihilation spectroscopy: Challenges and opportunities

F Tuomisto - physica status solidi (RRL)–Rapid Research …, 2021 - Wiley Online Library
Three topical materials systems are discussed from the point of view of point defect
characterization with positron annihilation spectroscopy. The family of III‐nitride …

Influence of implanted Mg concentration on defects and Mg distribution in GaN

A Kumar, W Yi, J Uzuhashi, T Ohkubo, J Chen… - Journal of Applied …, 2020 - pubs.aip.org
METHODS Mg ion-implantation was carried out in 4 μm-thick not intentionally doped GaN
epitaxial layers grown by MOCVD on free standing GaN substrates oriented along the c …