MEMS inductor fabrication and emerging applications in power electronics and neurotechnologies

HT Le, RI Haque, Z Ouyang, SW Lee, SI Fried… - Microsystems & …, 2021 - nature.com
MEMS inductors are used in a wide range of applications in micro-and nanotechnology,
including RF MEMS, sensors, power electronics, and Bio-MEMS. Fabrication technologies …

A review on enabling technologies for high power density power electronic applications

M Mahesh, KV Kumar, M Abebe, L Udayakumar… - Materials Today …, 2021 - Elsevier
Abstract Power Electronic Systems for various applications have gone through several
stages of development during last five decades. Its development especially in high power …

Multidirectional UV lithography for complex 3-D MEMS structures

YK Yoon, JH Park, MG Allen - Journal of …, 2006 - ieeexplore.ieee.org
Various three-dimensionally (3-D) complex MEMS structures are fabricated using
multidirectional ultraviolet (UV) lithography, which includes reverse-side exposure through a …

3-D-printed air-core inductors for high-frequency power converters

W Liang, L Raymond, J Rivas - IEEE Transactions on Power …, 2015 - ieeexplore.ieee.org
This paper presents the design, modeling, and characterization of 3-D-printed air-core
inductors for high-frequency power electronics circuits. The use of 3-D modeling techniques …

High-Q Three-Dimensional Microfabricated Magnetic-Core Toroidal Inductors for Power Supplies in Package

HT Le, Y Nour, Z Pavlovic, C O'Mathúna… - … on power electronics, 2018 - ieeexplore.ieee.org
The integration of power inductors is a roadblock in realizing highly miniaturized power
supply in package (PSiP) and power supply on chip. Inductors in such power systems are …

RF MEMS inductors and their applications—A review

OF Hikmat, MSM Ali - Journal of Microelectromechanical …, 2016 - ieeexplore.ieee.org
Inductors are primary elements in many radio frequency circuitries and devices. This review
gives a comprehensive survey on the developments and performances of fixed and variable …

A technology overview of the powerchip development program

M Araghchini, J Chen, V Doan-Nguyen… - … on Power Electronics, 2013 - ieeexplore.ieee.org
The PowerChip research program is developing technologies to radically improve the size,
integration, and performance of power electronics operating at up to grid-scale voltages (eg …

A 60-GHz CPW-fed high-gain and broadband integrated horn antenna

B Pan, Y Li, GE Ponchak… - … on Antennas and …, 2009 - ieeexplore.ieee.org
An integrated horn antenna is presented for 60-GHz WPAN applications. Compared with
other types of antenna for 60-GHz WPAN applications, an integrated horn antenna features …

Fabrication of 3D air-core MEMS inductors for very-high-frequency power conversions

HT Le, I Mizushima, Y Nour, PT Tang, A Knott… - Microsystems & …, 2018 - nature.com
We report a fabrication technology for 3D air-core inductors for small footprint and very-high-
frequency power conversions. Our process is scalable and highly generic for fabricating …

Microfabrication technologies for a coupled three-dimensional microelectrode, microfluidic array

S Rajaraman, SO Choi, RH Shafer… - Journal of …, 2007 - iopscience.iop.org
Planar or two-dimensional (2D) microelectrode arrays (MEAs), which are used for in vitro
culturing of neurons and tissue slices, have been in existence for over 30 years. However, in …