Pull-in instability as an inherently nonlinear and crucial effect continues to become
increasingly important for the design of electrostatic MEMS and NEMS devices and ever …

Micro and nanoelectromechanical systems M/NEMS have been extensively investigated
and exploited in the past few decades for various applications and for probing fundamental …

Triggering an alarm in a car for low air-pressure in the tire or tripping an HVAC compressor if
the refrigerant pressure is lower than a threshold value are examples for applications where …

This paper presents a multi-threshold inertial switch demonstrated experimentally and
through simulation. A laterally-driven multi-threshold inertial switch based on SOIMUMPs …

This paper presents a review of the recent advances on micromachined inertial
switches/triggers. The review focuses on their advantages and disadvantages, sensitive …

A general model of a mode-localized mass sensor incorporating two weakly coupled
clamped-clamped microbeams under electrostatic excitation is presented, and a reduced …

In this study, we demonstrate analytically and experimentally the excitations of the higher
order modes of vibrations in electrostatically actuated clamped–clamped microbeam …

We report on the architecture and operational principle of a resonant cantilever-type
displacement sensor. The device is actuated electrostatically by a side electrode that is …

We present an experimental and theoretical investigation of a micromachined mirror under a
mixed-frequency signal composed of two harmonic ac sources. The micromirror is made of …

In this study, a microelectromechanical system (MEMS) beam is experimentally released
from pull-in using electrostatic levitation. A MEMS cantilever with a parallel plate electrode …