Grating plays an essential role in various optical systems owing to its unique dispersion
properties. In recent years, there is increasing demand to miniaturize optical systems for a …

Because of their large output strain, dielectric elastomer actuators (DEAs) have been
proposed for tunable optics applications such as tunable gratings. However, the inherent …

A method for fabricating a tunable Fabry-Perot cavity comprises etching a substrate to form
two reflectors separated by an air gap and an electrostatic mechanism. One of the two …

Based on the theory of electromagnetically induced transparency, we study the formation of
all-optical blazed transmission gratings in a coherently driven three-level atomic system …

A large-displacement thermal actuator designed for the MEMS pitch-tunable grating device
has been designed, simulated, fabricated and characterized in this paper. To avoid the …

A methodology to predict shock and vibration levels that could lead to the failure of MEMS
devices is reported as a function of vibration frequency and shock pulse duration. A …

Femtosecond laser manufacturing combined with chemical etching has recently emerged as
a flexible platform for fabricating three-dimensional devices and integrated optical elements …

This paper presents the design, modeling, fabrication, and testing of an optical phased array
(OPA) based scanner utilizing microelectromechanical system (MEMS) micromirrors with in …

Diffraction gratings are among the most commonly used optical elements in applications
ranging from spectroscopy and metrology to lasers. Numerous methods have been adopted …

Theoretical analysis is presented for a pitch-variable blazed grating which consists of
freestanding silicon beams. The pitch-variable blazed grating is implemented by combining …