Wafer bonding is an attractive technology that can join homo/heterogeneous materials into
one composite. It has a wide range of applications in the micro-electro-mechanical system …

Entering the era of the Internet of Things (IoT) and fifth-generation (5G) mobile networks, the
demand for compact, cost-effective, and high-performance sensors and actuators is …

Endoscopic optical-coherence tomography (OCT) systems require low cost mirrors with
small footprint size, out-of-plane deflections and low bias voltage. These requirements can …

This paper presents a flexible printed circuit board (FPCB) actuator-driven micromirror
(referred to as FPCB micromirror hereafter)-based laser projection indicator. The device …

In this paper, we demonstrate a variable aperture with graded attenuation combined with
adjustable focal length lens actuated by hydraulic control. Two cylindrical chambers and a …

Micromirrors have recently emerged as an essential component in optical scanning
technology, attracting considerable attention from researchers. Their compact size and …

The platform concept and methodology to create three-dimensional (3D) tubular structures
by releasing the stress of two-dimensional multilayer membranes has been demonstrated …

We report on the modeling and testing of a Vernier latched MEMS variable optical attenuator
(VOA) which uses chevron electrothermal microactuators to control fiber-to-fiber optical …

The lateral dimensions of micro-and nanostructures obtained by microcontact printing (μCP)
can be easily varied by selecting stamps with the desired spacing and pattern. However, the …

We report an optofluidics-based variable optical attenuator (VOA) employing a tapered side-
polished single-mode optical fiber attached to an electrowetting-on-dielectric (EWOD) …