Actuators for micropositioners and nanopositioners

NB Hubbard, ML Culpepper, LL Howell - 2006 - asmedigitalcollection.asme.org
A summary of recent research in micropositioning and nanopositioning is presented. The
work is classified into five groups by actuation approach, including piezoelectric, magnetic …

Power consumption reduction scheme of magnetic microactuation using electroplated Cu–Ni nanocomposite

YW Huang, TY Chao, CC Chen, YT Cheng - Applied physics letters, 2007 - pubs.aip.org
This letter presents a power consumption reduction scheme of magnetic microactuation
using Cu–Ni nanocomposite film which is electroplated in alkaline noncyanide based Ni …

Ferrofluid-based microchip pump and valve

H Hartshorne, CJ Backhouse, WE Lee - Sensors and Actuators B …, 2004 - Elsevier
Fluid control is a key element in the performance of microfluidic “lab-on-a-chip” devices. The
development of integrated multi-function micro-chemical reactors and analysis platforms …

Design and analysis of a recoil-type vibrotactile transducer

HY Yao, V Hayward - The Journal of the Acoustical Society of America, 2010 - pubs.aip.org
This article describes the design of a high-bandwidth, iron-less, recoil-based
electromagnetic vibrotactile actuator. Its working principle, the theoretical analysis, the …

PDMS based electromagnetic actuator membrane with embedded magnetic particles in polymer composite

MM Said, J Yunas, RE Pawinanto, BY Majlis… - Sensors and Actuators A …, 2016 - Elsevier
A PDMS based flexible membrane made of polymer composite with embedded NdFeB
magnetic particle has been developed using simple MEMS process. The magnetic polymer …

Fabrication and testing of a magnetically actuated micropump

S Santra, P Holloway, CD Batich - Sensors and Actuators B: Chemical, 2002 - Elsevier
A micropump has been fabricated in a modular fashion using silicone elastomers, which are
cheap, tough, durable and inert. For modular assembly, molded bodies capture a thin valve …

An electromagnetic micro-actuator with PDMS-Fe3O4 nanocomposite magnetic membrane

AA Paknahad, M Tahmasebipour - Microelectronic Engineering, 2019 - Elsevier
Polydimethylsiloxane-Fe 3 O 4 nanocomposite is introduced as a competent magnetic
material to utilize in the magnetic membrane micro-actuators, for first time in this paper …

Tunable electromagnetically actuated liquid-filled lens

H Yu, G Zhou, FS Chau, SK Sinha - Sensors and actuators A: physical, 2011 - Elsevier
In this paper, one type of tunable liquid-filled lens using electromagnetic actuation method is
presented. Besides the simpler configuration and better compatibility with the mainstream …

Thick photoresist development for the fabrication of high aspect ratio magnetic coils

M Brunet, T O'Donnell, J O'Brien… - Journal of …, 2002 - iopscience.iop.org
This paper reports the fabrication of coils for micro-magnetic devices on silicon using thick
photoresists commonly used in the manufacture of microelectromechanical systems. A …

Optimization of magnetoactive polymer membranes using radial magnetization

YC Kim, J Lee, SM Park - Materials Today Communications, 2024 - Elsevier
Magnetoactive polymer membranes (MAPMs) are manufactured by synthesizing magnetic
powders and silicon. Owing to the unique combination of their magnetic and elastic …