Ultra-thin die and method of fabricating same
DP Mancini, YS Chung, WJ Dauksher… - US Patent …, 2009 - Google Patents
In accordance with a specific embodiment, a method of processing a semiconductor
substrate is disclosed whereby the substrate is thinned, and the dice formed on the substrate …
substrate is disclosed whereby the substrate is thinned, and the dice formed on the substrate …
Scanning probe system with spring probe and actuation/sensing structure
T Hantschel, EM Chow, DK Fork, MA Rosa… - US Patent …, 2004 - Google Patents
Scanning probe microscopy (SPM; also known as atomic force microscopy (AFM) is
considered a spin-off of Scan ning tunneling microscopy (STM). An SPM system mea Sures …
considered a spin-off of Scan ning tunneling microscopy (STM). An SPM system mea Sures …
Probe structures incorporating nanowhiskers, production methods thereof and methods of forming nanowhiskers
L Samuelson, B Ohlsson - US Patent App. 10/751,943, 2005 - Google Patents
A probe Structure for a Scanning probe microScope com prises a nanowhisker (16, 34)
projecting from a free end of an upstanding tip member (4, 26), and being formed inte grally …
projecting from a free end of an upstanding tip member (4, 26), and being formed inte grally …
Scanning probe system with spring probe
T Hantschel, EM Chow, DK Fork - US Patent 6,668,628, 2003 - Google Patents
Appl. No.: 10/112,215(57) 1-1. Scanning probe Systems, which include Scanning probe (22)
Filed: Mar. 29, 2002 microscopes (SPMs), atomic force microscope (AFMs), or (65) Prior …
Filed: Mar. 29, 2002 microscopes (SPMs), atomic force microscope (AFMs), or (65) Prior …
Scanning probe system with spring probe
T Hantschel, EM Chow, DK Fork - US Patent 6,788,086, 2004 - Google Patents
Scanning probe Systems, which include Scanning probe microscopes (SPMs), atomic force
microscope (AFMs), or profilometers, are disclosed that use cantilevered Spring (eg, stressy …
microscope (AFMs), or profilometers, are disclosed that use cantilevered Spring (eg, stressy …
Sensors for electrochemical, electrical or topographical analysis
FB Prinz, Y Tao, RJ Fasching, RS Greco… - US Patent …, 2008 - Google Patents
Sensors and systems for electrical, electrochemical, or topo graphical analysis, as well as
methods of fabricating these sensors are provided. The sensors include a cantileverandone …
methods of fabricating these sensors are provided. The sensors include a cantileverandone …
Sputtered spring films with low stress anisotropy
Methods are disclosed for fabricating Spring Structures that minimize helical twisting by
reducing or eliminating StreSS anisotropy in the thin films from which the Springs are formed …
reducing or eliminating StreSS anisotropy in the thin films from which the Springs are formed …
Method of fabricating a surface probing device and probing device produced thereby
SC Minne - US Patent 6,886,395, 2005 - Google Patents
Newholm Stein & Gratz, SC (57) ABSTRACT A method of making a probe having a
cantilever and a tip include providing a Substrate having a Surface and forming a tip …
cantilever and a tip include providing a Substrate having a Surface and forming a tip …
Nanoprobe tip for advanced scanning probe microscopy comprising a layered probe material patterned by lithography and/or FIB techniques
2. Description of the Related Art In manufacturing microstructures, such as integrated cir
cuits, micromechanical devices, opto-electronic components and the like, device features …
cuits, micromechanical devices, opto-electronic components and the like, device features …
High force metal plated spring structure
EM Chow, DK Fork, T Hantschel… - US Patent …, 2006 - Google Patents
US7015584B2 - High force metal plated spring structure - Google Patents US7015584B2 -
High force metal plated spring structure - Google Patents High force metal plated spring …
High force metal plated spring structure - Google Patents High force metal plated spring …