High aspect ratio nanostructuring requires high precision pattern transfer with highly
directional etching. In this work, we demonstrate the fabrication of structures with ultra-high …

One-dimensional (1-D) nanostructures such as nanowires and nanotubes have been widely
explored for anodes with high specific capacity in Li-ion batteries, which effectively release …

Considering the goal of lithography under its most general aspect–that is, transferring and
recording mask or template information in the form of contrast between the imaged and non …

Soft x-ray spectroscopy with high resolving power (R= λ/Δλ) and large effective area (A)
addresses numerous unanswered science questions about the physical laws that lead to the …

Getting high aspect ratio (HAR) structures is a frequent request in directional etching of
silicon using mainstream plasma tools. HAR features are useful either directly (eg, photonic …

High-resolution spectroscopy of astrophysical sources is the key to gaining a quantitative
understanding of the history, dynamics, and current conditions of the cosmos. A large-area …

Lynx is one of four Surveyor-class mission concept studies for the 2020 Astrophysics
Decadal Survey. It features an x-ray telescope with an unprecedented collecting area of 2 …

A number of high priority subjects in astrophysics can be addressed by a state-of-the-art soft
x-ray grating spectrometer, such as the role of Active Galactic Nuclei in galaxy and star …

We report on measurements of the diffraction efficiency of 200-nm-period freestanding
blazed transmission gratings for wavelengths in the 0.96 to 19.4? nm range. These critical …

Geometry-induced doping (G-doping) has been realized in semiconductors nanograting
layers. G-doping-based pp (v) junction has been fabricated and demonstrated with …