Chemical vapor deposition single‐crystal diamond: a review
JC Arnault, S Saada… - physica status solidi (RRL) …, 2022 - Wiley Online Library
With its outstanding physical properties, single‐crystal diamond is the material of choice for
future power electronics and quantum devices. The later application field is based on the …
future power electronics and quantum devices. The later application field is based on the …
Energy beam-based direct and assisted polishing techniques for diamond: A review
Z Li, F Jiang, Z Jiang, Z Tian, T Qiu… - … Journal of Extreme …, 2023 - iopscience.iop.org
Diamond is a highly valuable material with diverse industrial applications, particularly in the
fields of semiconductor, optics, and high-power electronics. However, its high hardness and …
fields of semiconductor, optics, and high-power electronics. However, its high hardness and …
Polishing, preparation and patterning of diamond for device applications
ML Hicks, AC Pakpour-Tabrizi, RB Jackman - Diamond and Related …, 2019 - Elsevier
Central to future electronic device developments in diamond is the provision of smooth, low
defect density substrate materials. This review examines plasma treatments of diamond to …
defect density substrate materials. This review examines plasma treatments of diamond to …
Uniform and stable plasma reactivity: Effects of nanosecond pulses and oxygen addition in atmospheric-pressure dielectric barrier discharges
F Liu, H Chu, Y Zhuang, Z Fang, R Zhou… - Journal of Applied …, 2021 - pubs.aip.org
Uniform and stable reactivity of atmospheric pressure plasmas is a prerequisite for most
applications in fields ranging from materials' surface processing, environment protection, to …
applications in fields ranging from materials' surface processing, environment protection, to …
Toward high‐performance diamond electronics: Control and annihilation of dislocation propagation by metal‐assisted termination
S Ohmagari, H Yamada, N Tsubouchi… - … status solidi (a), 2019 - Wiley Online Library
A major obstacle limiting diamond electronics is dislocations, which deteriorate device
properties. As threading dislocations (TDs) are normally inherited from the substrate to the …
properties. As threading dislocations (TDs) are normally inherited from the substrate to the …
[HTML][HTML] Reactive ion etching of single crystal diamond by inductively coupled plasma: State of the art and catalog of recipes
A Toros, M Kiss, T Graziosi, S Mi, R Berrazouane… - Diamond and Related …, 2020 - Elsevier
Reactive ion etching of single crystal diamond by inductively coupled plasma: State of the
art and catalog of recipes - ScienceDirect Skip to main contentSkip to article Elsevier logo …
art and catalog of recipes - ScienceDirect Skip to main contentSkip to article Elsevier logo …
Effects of O2 addition on the plasma uniformity and reactivity of Ar DBD excited by ns pulsed and AC power supplies
LIU Feng, Y ZHUANG, Z Yulei, C Jie… - Plasma Science and …, 2022 - iopscience.iop.org
Dielectric barrier discharges (DBDs) have been widely used in ozone synthesis, materials
surface treatment, and plasma medicine for their advantages of uniform discharge and high …
surface treatment, and plasma medicine for their advantages of uniform discharge and high …
Diamond Etching Beyond 10 μm with Near-Zero Micromasking
ML Hicks, AC Pakpour-Tabrizi, RB Jackman - Scientific Reports, 2019 - nature.com
To exploit the exceptional properties of diamond, new high quality fabrication techniques are
needed to produce high performing devices. Etching and patterning diamond to depths …
needed to produce high performing devices. Etching and patterning diamond to depths …
Benchmarking Diamond Surface Preparation and Fluorination via Inductively Coupled Plasma-Reactive Ion Etching
Diamond, renowned for its exceptional semiconducting properties, stands out as a
promising material for high-performance power electronics, optics, quantum, and biosensing …
promising material for high-performance power electronics, optics, quantum, and biosensing …
Fabrication and characterization of single-crystal diamond membranes for quantum photonics with tunable microcavities
J Heupel, M Pallmann, J Körber, R Merz, M Kopnarski… - Micromachines, 2020 - mdpi.com
The development of quantum technologies is one of the big challenges in modern research.
A crucial component for many applications is an efficient, coherent spin–photon interface …
A crucial component for many applications is an efficient, coherent spin–photon interface …