MEMS-based tactile sensors: Materials, processes and applications in robotics

IS Bayer - Micromachines, 2022 - mdpi.com
Commonly encountered problems in the manipulation of objects with robotic hands are the
contact force control and the setting of approaching motion. Microelectromechanical systems …

Low-cost foil/paper based touch mode pressure sensing element as artificial skin module for prosthetic hand

RB Mishra, SM Khan, SF Shaikh… - 2020 3rd IEEE …, 2020 - ieeexplore.ieee.org
Capacitive pressure sensors have several advantages in areas such as robotics,
automation, aerospace, biomedical and consumer electronics. We present mathematical …

Flexible capacitive hydrogel tactile sensor with adjustable measurement range using liquid crystal and carbon nanotubes composites

L Chen, J Liu, X Wang, B Ji, X Chen… - IEEE Transactions on …, 2017 - ieeexplore.ieee.org
In this paper, we present a 4× 4 capacitive pressure tactile sensor fabricated with new
materials, which consists of one dielectric layer and two electrode layers. The dielectric layer …

Pre-stressed diaphragm based capacitive pressure sensor for blood pressure sensing application

RB Mishra, SS Kumar - 2018 Second International Conference …, 2018 - ieeexplore.ieee.org
The paper presents Micro-electro-mechanical system (MEMS) based clamped circular
capacitive pressure sensor with pre-stressed diaphragm made of polysilicon material with …

Novel MEMS piezoresistive sensor with hair-pin structure to enhance tensile and compressive sensitivity and correct non-linearity

SK Jindal, R De, A Kumar, SK Raghuwanshi - Journal of Electronic Testing, 2020 - Springer
This work focuses on enhancing the sensitivity and reducing the wheatstone bridge non-
linearity of the current designs of Micro-Electro-Mechanical systems pressure sensor …

A capacitive pressure-sensitive chip with linkage film

R Chuai, B Zhang, Y Yang, G Jiang, H Zhang… - Microelectronics Journal, 2021 - Elsevier
In order to enhance the performance of capacitive pressure sensors, a novel pressure-
sensitive chip with linkage film is designed. In this construct, its top electrode plate adopts a …

Novel FET-type Barometric Pressure Sensor Integrated with FET-type Gas Sensor

이차영 - 2024 - s-space.snu.ac.kr
This research introduces a novel metal-oxide-semiconductor field-effect transistor (MOSFET)-
based barometric pressure sensor, featuring a p-type buried channel, an air gap, and an air …

Efficient Integration of Barometric Pressure Sensors and Si FET-type Gas Sensors on the Same Substrate

장동규 - 2020 - s-space.snu.ac.kr
Sensor technology is becoming increasingly important to improve the quality of human life.
Especially, various kinds of sensor technology have become essential due to increasing …