Deposition and characterization of molybdenum thin film using direct current magnetron and atomic force microscopy
In this paper, pure molybdenum (Mo) thin film has been deposited on blank Si substrate by
DC magnetron sputtering technique. The deposition condition for all samples has not been …
DC magnetron sputtering technique. The deposition condition for all samples has not been …
Influence of tantalum's crystal phase growth on the microstructural, electrical and mechanical properties of sputter-deposited tantalum thin film layer
High melting point refractory tantalum (Ta) metal is frequently grown into thin film layer for
many applications in biomedical implants, microelectronic devices and micro-level …
many applications in biomedical implants, microelectronic devices and micro-level …
Control of physical and microstructural properties in molybdenum by direct current magnetron sputtering deposition producing bilayer thin film
Molybdenum (Mo) thin films are widely used in microelectromechanical systems (MEMS)
applications. Mo bilayer deposition by direct current (DC) magnetron sputtering has been …
applications. Mo bilayer deposition by direct current (DC) magnetron sputtering has been …
Reactive ion etching of tantalum in silicon tetrachloride
AKE Al-mashaal, R Cheung - Microelectronic Engineering, 2022 - Elsevier
A precise patterning of metal structures plays an essential role in the development of
feasible metal-based devices. By examining the etching conditions under which a layer of …
feasible metal-based devices. By examining the etching conditions under which a layer of …
Low frequency tantalum electromechanical systems for biomimetical applications
The integration of p-channel metal-oxide-semiconductor transistors and tantalum bridge
structures for the fabrication of resonant gate transistors (RGTs) that operate in the audible …
structures for the fabrication of resonant gate transistors (RGTs) that operate in the audible …
Fabrication and characterisation of suspended microstructures of tantalum
E Mastropaolo, A Bunting, C Dunare… - Journal of …, 2016 - iopscience.iop.org
An investigation of the influence of deposition and post-fabrication processes on the final
mechanical structure of tantalum beams is reported in the present study. The final deflection …
mechanical structure of tantalum beams is reported in the present study. The final deflection …
Bimaterial electromechanical systems for a biomimetical acoustic sensor
E Mastropaolo, R Latif, T Koickal, A Hamilton… - Journal of Vacuum …, 2012 - pubs.aip.org
Bimaterial planarized micromechanical beams have been designed, simulated, and
fabricated with lengths in the range 800–5800 μm and distance to substrate 0.8–4.0 μm. The …
fabricated with lengths in the range 800–5800 μm and distance to substrate 0.8–4.0 μm. The …
Reduction of Subthreshold Leakage Current in Resonant Gate Transistor
MZA Ramli, A Marzuki, M Othman… - 2024 IEEE International …, 2024 - ieeexplore.ieee.org
The channel in a resonant gate transistor (RGT) transduces the resonator's mechanical
movement into electrical signals. The device finds its application in acoustic sensing as a …
movement into electrical signals. The device finds its application in acoustic sensing as a …
3D finite element analysis of corrugated silicon carbide membrane for ultrasonic MEMS microphone applications
We investigated theoretically the feasibility of the SiC membrane to be applied to a MEMS
capacitive microphone system in the ultrasonic frequency range. The fascinating …
capacitive microphone system in the ultrasonic frequency range. The fascinating …
MEMS design and modelling based on resonant gate transistor for cochlear biomimetical application
The electromechanical behaviour and frequency response of the human cochlear have
been described to be mimicked using an array of resonant gate transistors (RGT). Presented …
been described to be mimicked using an array of resonant gate transistors (RGT). Presented …