A review of recent research on heat transfer in three-dimensional integrated circuits (3-D ICs)

SS Salvi, A Jain - IEEE Transactions on Components …, 2021 - ieeexplore.ieee.org
Three-dimensional integrated circuits (3-D IC) technology has emerged in the past few
decades, driven in part by the techno-economic difficulties of dimensional scaling and the …

Recent advances in EM and BTI induced reliability modeling, analysis and optimization

SXD Tan, H Amrouch, T Kim, Z Sun, C Cook, J Henkel - Integration, 2018 - Elsevier
In this article, we will present recent advances in reliability effects such as electromigration
on interconnects and Negative/Positive Bias Temperature Instability (N/P BTI) effects on …

Fast electromigration immortality analysis for multisegment copper interconnect wires

Z Sun, E Demircan, MD Shroff, C Cook… - IEEE Transactions on …, 2018 - ieeexplore.ieee.org
In this paper, we present a novel and fast electromigration (EM) immortality check for
general multisegment interconnect wires. Instead of using current density as the key …

TSV-based 3-D ICs: Design methods and tools

T Lu, C Serafy, Z Yang, SK Samal… - … on Computer-Aided …, 2017 - ieeexplore.ieee.org
Vertically integrated circuits (3-D ICs) may revitalize Moore's law scaling which has slowed
down in recent years. 3-D stacking is an emerging technology that stacks multiple dies …

Design for manufacturability and reliability in extreme-scaling VLSI

B Yu, X Xu, S Roy, Y Lin, J Ou, DZ Pan - Science China Information …, 2016 - Springer
In the last five decades, the number of transistors on a chip has increased exponentially in
accordance with the Moore's law, and the semiconductor industry has followed this law as …

Voltage-based electromigration immortality check for general multi-branch interconnects

Z Sun, E Demircan, MD Shroff, T Kim… - 2016 IEEE/ACM …, 2016 - ieeexplore.ieee.org
As VLSI technology features are pushed to the limit with every generation and with the
introduction of new materials and increased current densities to satisfy the performance …

Electrical characteristics and reliability of wafer-on-wafer (WOW) bumpless through-silicon via

YC Tsai, CH Lee, HC Chang, JH Liu… - … on Electron Devices, 2021 - ieeexplore.ieee.org
Electrical characteristics and reliability of the wafer-on-wafer (WOW) bumpless through-
silicon via (TSV) structure are investigated, and the new lumped circuit model is proposed to …

An analytical through silicon via (TSV) surface roughness model applied to a millimeter wave 3-D IC

MA Ehsan, Z Zhou, L Liu, Y Yi - IEEE Transactions on …, 2015 - ieeexplore.ieee.org
In the millimeter wave (mmW) frequency range, the root mean square height of the through
silicon via (TSV) sidewall roughness is comparable to the skin depth, and hence, becomes a …

The experimental analysis and the mechanical model for the debonding failure of TSV-Cu/Si interface

S Chen, Z Wang, Y En, Y Huang, F Qin, T An - Microelectronics Reliability, 2018 - Elsevier
We have investigated the debonding failure of the through-silicon via (TSV)–Cu/Si interface
during annealing treatment at 425° C. The interface microstructure was characterized by two …

An ion beam layer removal method of determining the residual stress in the as-fabricated TSV-Cu/TiW/SiO2/Si interface on a nanoscale

S Chen, YF En, GY Li, ZZ Wang, R Gao, R Ma… - Microelectronics …, 2020 - Elsevier
Thermally induced residual stresses across the TSV-Cu/TiW/SiO 2/Si interface in through‑
silicon vias (TSVs) have raised serious concerns about mechanical and electrical reliability …