An overview of microelectromechanical systems (MEMS) resonators for frequency reference
and timing applications is presented. The progress made in the past few decades in design …

In this paper, the basic concepts of the equivalent model, vibration modes, and conduction
mechanisms of MEMS resonators are described. By reviewing the existing representative …

This paper describes a high-resolution energy-efficient CMOS temperature sensor, intended
for the temperature compensation of MEMS/quartz frequency references. The sensor is …

This letter presents a high-performance resonant MEMS accelerometer comprising of a
single force-sensitive vibrating beam element sandwiched between two inertial masses. The …

Compared to conventional sensors, resonant-based sensors output frequency signals
instead of voltage signals and therefore have greater advantages in terms of accuracy, noise …

This paper describes a compact, energy efficient, resistor-based temperature sensor that
can operate over a wide temperature range (-55° C-125° C). The sensor is based on a …

Detection of volatile organic compounds (VOCs), challenged by their diversity and similarity,
is gaining much attention due to concerns about adverse health effects they cause, along …

This article describes a highly energy-efficient Wheatstone bridge temperature sensor. To
maximize sensitivity, the bridge is made from resistors with positive (silicided diffusion) and …

This article presents an energy-efficient dual-frequency reference intended for wireless
sensor nodes. It consists of a digital frequency-locked loop (FLL) in which the frequency of a …

Mechanical resonators are widely used as precision clocks and sensitive detectors that rely
on the stability of their eigenfrequencies. The phase noise is determined by different factors …