[HTML][HTML] A review of Ga2O3 materials, processing, and devices

SJ Pearton, J Yang, PH Cary, F Ren, J Kim… - Applied Physics …, 2018 - pubs.aip.org
Gallium oxide (Ga 2 O 3) is emerging as a viable candidate for certain classes of power
electronics, solar blind UV photodetectors, solar cells, and sensors with capabilities beyond …

The structure of low-index surfaces of β-Ga2O3

VM Bermudez - Chemical Physics, 2006 - Elsevier
The physical and electronic structure of the (100),(010),(001) and (101¯) faces of β-Ga2O3
are addressed using ab initio theory. Restricted Hartree–Fock calculations, with large-core …

Recent development of gallium oxide thin film on GaN

HS Oon, KY Cheong - Materials science in semiconductor processing, 2013 - Elsevier
Gallium nitride (GaN) has attracted much attention due to its outstanding characteristics. It
may replace conventional semiconductor materials, such as silicon, that are approaching …

Comprehensive study on initial thermal oxidation of GaN (0001) surface and subsequent oxide growth in dry oxygen ambient

T Yamada, J Ito, R Asahara, K Watanabe… - Journal of applied …, 2017 - pubs.aip.org
Initial oxidation of gallium nitride (GaN)(0001) epilayers and subsequent growth of thermal
oxides in dry oxygen ambient were investigated by means of x-ray photoelectron …

Highly efficient and atomic scale polishing of GaN via plasma-based atom-selective etching

L Zhang, B Wu, Y Zhang, H Deng - Applied Surface Science, 2023 - Elsevier
Plasma-based atom-selective etching (PASE) of GaN is conducted to realize the highly
efficient planarization of the GaN surface. Inductively coupled plasma with high temperature …

Growth of gallium oxide thin films on silicon by the metal organic chemical vapor deposition method

HW Kim, NH Kim - Materials Science and Engineering: B, 2004 - Elsevier
We have deposited gallium oxide (Ga2O3) films on Si (100) substrates by metal organic
chemical vapor deposition (MOCVD), by a reaction of a trimethylgallium (TMGa) and oxygen …

Annealing effects on the properties of Ga2O3 thin films grown on sapphire by the metal organic chemical vapor deposition

HW Kim, NH Kim - Applied surface science, 2004 - Elsevier
We have prepared the gallium oxide (Ga2O3) thin films on sapphire substrates by the metal
organic chemical vapor deposition (MOCVD) technique. We have compared the two films …

Substrate orientation dependent current transport mechanisms in β-Ga2O3/Si based Schottky barrier diodes

MK Yadav, A Mondal, SK Sharma, A Bag - Journal of Vacuum Science …, 2021 - pubs.aip.org
Sapphire and gallium oxide have been used as substrates for most of the reported results on
β-Ga 2 O 3 devices. However, silicon (Si) is an abundant material on the Earth, leading to …

[HTML][HTML] Thermal oxidation of [0001] GaN in water vapor compared with dry and wet oxidation: Oxide properties and impact on GaN

Ł Janicki, R Korbutowicz, M Rudziński… - Applied Surface …, 2022 - Elsevier
Conventionally thermal oxidation of GaN is performed in either dry or wet oxygen ambient. In
this work thermal oxidation in water vapor ambient, together with the two above mentioned …

Performance enhancement of β-Ga2O3 on Si (100) based Schottky barrier diodes using reduced surface field

MK Yadav, A Mondal, S Shringi… - Semiconductor …, 2020 - iopscience.iop.org
Schottky barrier diodes (SBDs) have been fabricated laterally on a β-Ga 2 O 3 film grown on
both p-type and n-type Si (100) substrates using a pulsed laser deposition technique. The …