We report on the formation of tubular structures and microneedles on the surface of
monocrystalline silicon using ultrashort laser pulses. Highly deterministic surface processing …

In the quest to expand the functionality and capacity of group IV semiconductor photonic
systems, new materials and production methods are constantly being explored. In particular …

以光子为信息传输媒介的光子集成芯片, 具有高带宽, 高速率, 高灵敏度等优点, 在光通信,
光互联, 光学传感等领域得到了广泛的研究与应用. 为了进一步提高光子集成芯片的集成度 …

In this paper, we demonstrate a broadband Mach-Zehnder interferometer optical switch
based on polycrystalline silicon (poly-Si), which enables the development of multilayer …

The performance of a photonic functional device in bulk CMOS has been limited by the high
propagation loss in polysilicon strip waveguide. Based on the zero-process-change …

Deposited photonics represents a promising avenue for monolithic back-end integration on
CMOS, yet encounters challenges in simultaneously enhancing waveguide loss and …

Traditional temperature detection has limitations in terms of sensing accuracy and response
time, while chip-level photoelectric sensors based on the thermo-optic effect can improve …

To realize compact and denser photonic integrated circuits, three-dimensional integration
has been widely accepted and researched. In this article, we demonstrate the operation of a …

We report nonlinear optical characterization of cm-long polycrystalline silicon (poly-Si)
waveguides at telecom wavelengths. Laser post-processing of lithographically-patterned …

Low-temperature deposited polycrystalline silicon waveguides are emerging as a flexible
platform that allows for dense optoelectronic integration. Here, the optical transmission …