This paper presents a dual-microelectromechanical system (MEMS) resonator-based
temperature sensor. In this sensor, the readout circuit estimates the temperature by …

In practical applications, the quick startup of microelectromechanical systems (MEMS)
sensors is particularly crucial, and the temperature drift during a power-on startup has …

Frequency references are the heartbeat of most electronic systems. Over the last decade,
MEMS-based frequency references have revolutionized the timing market by outperforming …

This dissertation explores the use of electrostatic force feedback to generate artificial
performance characteristics in a microdevice that would otherwise not be possible. As a test …

Many applications demand precision oscillators, which are usually generated through
employing resonators with high quality factor (Q). Quartz and MicroElectroMechanical …