Germanium‐based monoelemental and binary two‐dimensional materials: Theoretical and experimental investigations and promising applications
Abstract Two‐dimensional (2D) materials based on group IVA elements have attracted
extensive attention owing to their rich chemical structures and novel properties. This …
extensive attention owing to their rich chemical structures and novel properties. This …
Cantilever-like micromechanical sensors
The field of cantilever-based sensing emerged in the mid-1990s and is today a well-known
technology for label-free sensing which holds promise as a technique for cheap, portable …
technology for label-free sensing which holds promise as a technique for cheap, portable …
Breathable and stretchable temperature sensors inspired by skin
Flexible electronics attached to skin for healthcare, such as epidermal electronics, has to
struggle with biocompatibility and adapt to specified environment of skin with respect to …
struggle with biocompatibility and adapt to specified environment of skin with respect to …
Lab-on-chip technologies: making a microfluidic network and coupling it into a complete microsystem—a review
Microfluidics is an emerging field that has given rise to a large number of scientific and
technological developments over the last few years. This review reports on the use of …
technological developments over the last few years. This review reports on the use of …
Water‐soluble sacrificial layers for surface micromachining
V Linder, BD Gates, D Ryan, BA Parviz, GM Whitesides - small, 2005 - Wiley Online Library
This manuscript describes the use of water‐soluble polymers for use as sacrificial layers in
surface micromachining. Water‐soluble polymers have two attractive characteristics for this …
surface micromachining. Water‐soluble polymers have two attractive characteristics for this …
Review of polymer MEMS micromachining
The development of polymer micromachining technologies that complement traditional
silicon approaches has enabled the broadening of microelectromechanical systems (MEMS) …
silicon approaches has enabled the broadening of microelectromechanical systems (MEMS) …
A review: electrode and packaging materials for neurophysiology recording implants
To date, a wide variety of neural tissue implants have been developed for neurophysiology
recording from living tissues. An ideal neural implant should minimize the damage to the …
recording from living tissues. An ideal neural implant should minimize the damage to the …
Thinning and shaping solid films into functional and integrative nanomembranes
Conventional solid films on certain substrates play a crucial role in various applications, for
example in flat panel displays, silicon technology, and protective coatings. Recently …
example in flat panel displays, silicon technology, and protective coatings. Recently …
Micro‐and nanomechanical structures for silicon carbide MEMS and NEMS
CA Zorman, RJ Parro - physica status solidi (b), 2008 - Wiley Online Library
Silicon carbide (SiC) is recognized as the leading semiconductor for high power and high
temperature electronics owing to its outstanding electrical properties combined with mature …
temperature electronics owing to its outstanding electrical properties combined with mature …
Wafer‐Scale High‐Quality Microtubular Devices Fabricated via Dry‐Etching for Optical and Microelectronic Applications
CN Saggau, F Gabler, DD Karnaushenko… - Advanced …, 2020 - Wiley Online Library
Mechanical strain formed at the interfaces of thin films has been widely applied to self‐
assemble 3D microarchitectures. Among them, rolled‐up microtubes possess a unique 3D …
assemble 3D microarchitectures. Among them, rolled‐up microtubes possess a unique 3D …