Wafer‐Scale Demonstration of Polycrystalline MoS2 Growth on 200 mm Glass and SiO2/Si Substrates by Plasma‐Enhanced Atomic Layer Deposition
J Jagosz, L Willeke, N Gerke… - Advanced Materials …, 2024 - Wiley Online Library
Abstract 2D materials like transition metal dichalcogenides (TMDCs) have been widely
studied and are a gateway to modern technologies. While research today is mostly carried …
studied and are a gateway to modern technologies. While research today is mostly carried …
Pulse Duration Dependent Formation of Laser‐Induced Periodic Surface Structures in Atomic Layer Deposited MoS2
MJMJ Becher, JB Ullrich, J Jagosz… - Advanced Materials …, 2024 - Wiley Online Library
In this paper, the formation of laser‐induced periodic surface structures (LIPSS) on atomic‐
layer deposited MoS2 layers are studied experimentally. The process parameters (laser …
layer deposited MoS2 layers are studied experimentally. The process parameters (laser …
Post treatment of plasma enhanced atomic layer deposited MoS2 via ultra short pulse laser to increase the crystallinity
MJMJ Becher, L Willeke, C Bock… - Laser+ Photonics for …, 2024 - spiedigitallibrary.org
2D molybdenum disulfide (MoS2) is a promising material for the application in the flexible
electronic, where large, uniform, crystalline films on flexible substrates are desired. The …
electronic, where large, uniform, crystalline films on flexible substrates are desired. The …
[引用][C] Wafer-Scale Demonstration of Polycrystalline MoS
J Jagosz, L Willeke, N Gerke, MJMJ Becher, P Plate… - 2024