A review of machine learning for the optimization of production processes
Due to the advances in the digitalization process of the manufacturing industry and the
resulting available data, there is tremendous progress and large interest in integrating …
resulting available data, there is tremendous progress and large interest in integrating …
Big data analytics in chemical engineering
Big data analytics is the journey to turn data into insights for more informed business and
operational decisions. As the chemical engineering community is collecting more data …
operational decisions. As the chemical engineering community is collecting more data …
A comparison study of basic data-driven fault diagnosis and process monitoring methods on the benchmark Tennessee Eastman process
This paper provides a comparison study on the basic data-driven methods for process
monitoring and fault diagnosis (PM–FD). Based on the review of these methods and their …
monitoring and fault diagnosis (PM–FD). Based on the review of these methods and their …
Total projection to latent structures for process monitoring
Partial least squares or projection to latent structures (PLS) has been used in multivariate
statistical process monitoring similar to principal component analysis. Standard PLS often …
statistical process monitoring similar to principal component analysis. Standard PLS often …
Decision-based virtual metrology for advanced process control to empower smart production and an empirical study for semiconductor manufacturing
Virtual metrology (VM) has been employed to improve the performance of advanced process
control for semiconductor manufacturing. A number of VM models have been proposed to …
control for semiconductor manufacturing. A number of VM models have been proposed to …
Adaptive virtual metrology for semiconductor chemical mechanical planarization process using GMDH-type polynomial neural networks
Virtual metrology (VM) is drawing more and more attention in the recent research of wafer to
wafer control for semiconductor manufacturing. Although many different approaches for VM …
wafer control for semiconductor manufacturing. Although many different approaches for VM …
Virtual metrology in semiconductor manufacturing: Current status and future prospects
Abstract Advanced Process Control (APC) has become an increasingly pressing issue for
the semiconductor industry, particularly in the new era of sub-5nm process technology. To …
the semiconductor industry, particularly in the new era of sub-5nm process technology. To …
Wafer classification using support vector machines
Increasing yield is a primary concern to integrated circuit manufacturing companies as it
dictates the readiness of a new process for high volume manufacturing. In order to expedite …
dictates the readiness of a new process for high volume manufacturing. In order to expedite …
An approach for factory-wide control utilizing virtual metrology
AA Khan, JR Moyne, DM Tilbury - IEEE Transactions on …, 2007 - ieeexplore.ieee.org
In the semiconductor manufacturing industry, market demands and technology trends drive
manufacturers towards increases in wafer size and decreases in device size. Application of …
manufacturers towards increases in wafer size and decreases in device size. Application of …
Study on modifications of PLS approach for process monitoring
Partial least squares (PLS) is an efficient approach for multivariate statistical process
monitoring. Although it works in many industrial applications, Zhou et al.[2010] revealed that …
monitoring. Although it works in many industrial applications, Zhou et al.[2010] revealed that …