Time-resolved optical emission spectroscopy of a unipolar and a bipolar pulsed magnetron sputtering discharge in an argon/oxygen gas mixture with a cobalt target

R Hippler, M Cada, V Stranak… - Plasma Sources Science …, 2019 - iopscience.iop.org
Reactive high power impulse magnetron sputtering (HiPIMS) of a cobalt cathode in pure
argon gas and with different oxygen admixtures was investigated by time-resolved optical …

Understanding microwave surface‐wave sustained plasmas at intermediate pressure by 2D modeling and experiments

V Georgieva, A Berthelot, T Silva… - Plasma processes …, 2017 - Wiley Online Library
An Ar plasma sustained by a surfaguide wave launcher is investigated at intermediate
pressure (200–2667 Pa). Two 2D self‐consistent models (quasi‐neutral and plasma bulk …

Measurement of Ar resonance and metastable level number densities in argon containing plasmas

M Fiebrandt, B Hillebrand… - Journal of Physics D …, 2017 - iopscience.iop.org
Abstract The resonance $1 s_4~({\hspace {0pt}}^ 3P_1),~ 1s_2~({\hspace {0pt}}^ 1P_1) $
and metastable $1 s_5~({\hspace {0pt}}^ 3P_2),~ 1s_3~({\hspace {0pt}}^ 3P_0) $ level …

Determination of atomic oxygen state densities in a double inductively coupled plasma using optical emission and absorption spectroscopy and probe measurements

M Fiebrandt, N Bibinov… - Plasma Sources Science …, 2020 - iopscience.iop.org
A collisional radiative model for fast estimation and monitoring of atomic oxygen ground and
excited state densities and fluxes in varying Ar: O 2 mixtures is developed and applied in a …

Escape factors for Paschen 2p–1s emission lines in low-temperature Ar, Kr, and Xe plasmas

XM Zhu, ZW Cheng, YK Pu… - Journal of Physics D …, 2016 - iopscience.iop.org
Radiation trapping phenomenon is often observed when investigating low-temperature
plasmas. Photons emitted from the upper excited states may be reabsorbed by the lower …

Study of Ar and Ar-CO2 microwave surfaguide discharges by optical spectroscopy

T Silva, N Britun, T Godfroid, J van der Mullen… - Journal of Applied …, 2016 - pubs.aip.org
A surfaguide microwave discharge operating at 2.45 GHz in Ar and Ar-CO 2 mixtures is
studied using diagnostics methods based on optical emission spectroscopy. The population …

Metastable argon atom density in complex argon/acetylene plasmas determined by means of optical absorption and emission spectroscopy

V Sushkov, AP Herrendorf… - Journal of Physics D …, 2016 - iopscience.iop.org
Optical emission and absorption spectroscopy has been utilized to investigate the instability
of acetylene-containing dusty plasmas induced by growing nano-particles. The density of Ar …

Influence of reactive oxygen species during deposition of iron oxide films by high power impulse magnetron sputtering

V Stranak, Z Hubicka, M Cada… - Journal of Physics D …, 2018 - iopscience.iop.org
Iron oxide films were deposited using high power impulse magnetron sputtering (HiPIMS) of
an iron cathode in an argon/oxygen gas mixture at different gas pressures (0.5 Pa, 1.5 Pa …

Spectral characterization of medium-pressure RF discharge in argon–oxygen mixture

I Jõgi, J Raud, K Hein, M Laan - Journal of Physics D: Applied …, 2014 - iopscience.iop.org
This study is devoted to the characterization of a 40 MHz RF discharge at 2 Torr pressure in
argon–oxygen mixtures (0–5% O 2 fraction). The electrical characteristics were used to …

Mass spectrometric investigations of plasma chemical reactions in a radiofrequency discharge with Ar/C2H2 and Ar/C2H2/O2 gas mixtures

AP Herrendorf, V Sushkov, R Hippler - Journal of Applied Physics, 2017 - pubs.aip.org
Plasma chemical reactions in complex Ar/C 2 H 2 and Ar/C 2 H 2/O 2 radiofrequency
plasmas with formation of nano-particles are investigated. Growing nano-particles cause a …