Recent progress in photonic processing of metal‐oxide transistors

E Yarali, C Koutsiaki, H Faber, K Tetzner… - Advanced Functional …, 2020 - Wiley Online Library
Over the past few decades, significant progress has been made in the field of photonic
processing of electronic materials using a variety of light sources. Several of these …

Innovative Infrared-pulsed laser assisted RF sputtered β-Ga2O3 thin film at low temperature process

YY Oh, J Ji, SH Kim, JH Koh - Journal of Alloys and Compounds, 2021 - Elsevier
Innovative new method for the pulsed laser assisted radio-frequency sputtering at low
temperature process was successfully applied for the β phase Ga 2 O 3 thin film as wide …

Rapid crystallization of electrohydrodynamically atomized ZrO2 thin films by laser annealing

X Li, J Deng, D Ge, H Yue - Applied Surface Science, 2020 - Elsevier
This paper aims to provide a simple and rapid fabricating method for solution-based ZrO 2
thin films. The ZrO 2 thin film was firstly deposited on a 316L stainless steel substrate by …

[HTML][HTML] Study of phosphorus-doped Si annealed by a multi-wavelength laser

D Choi, J Shin - Results in Physics, 2022 - Elsevier
Activation annealing of phosphorus (P)-doped Si was performed with a red–greenblue
(RGB) laser to evaluate its potential for the uniform heating of patterned semiconductor …

[PDF][PDF] Formation of periodic structures on the solid surface under laser irradiation

OO Havryliuk, OY Semchuk - Ukrainian journal of physics, 2017 - irbis-nbuv.gov.ua
Advances in the development of technologies aimed at the production of periodic structures
on the surface of semiconductors, metals, and insulators have been reviewed. Particular …

Metastability of a-SiOx: H thin films for c-Si surface passivation

L Serenelli, L Martini, L Imbimbo, R Asquini… - Applied Surface …, 2017 - Elsevier
The adoption of a-SiO x: H films obtained by PECVD in heterojunction solar cells is a key to
further increase their efficiency, because of its transparency in the UV with respect to the …

Amorphous–Crystalline phase transition in nanostructural thin SiOx layers induced by pulsed laser radiation

L Fedorenko, A Medvids, V Yukhymchuk… - Optics & Laser …, 2022 - Elsevier
The possibility of laser-induced structural transformation of amorphous SiO x thin layers into
the SiO x-based nanocomposite layers with increased Si nanoparticles (NPs) has been …

[PDF][PDF] Формування періодичних структур на поверхні твердого тіла під дією лазерного випромінювання

ОО Гаврилюк, ОЮ Семчук - Український фізичний журнал, 2017 - irbis-nbuv.gov.ua
Розглянуто досягнення в областi створення технологiй отримання перiодичних
структур на поверхнi напiвпровiдникiв, металiв та дiелектрикiв. Особливу увагу …

Capacitive and Inductive Properties of Composite Films with Silicon and Metal Nanocrystals

V Ievtukh, A Kizjak, A Evtukh… - 2019 IEEE 39th …, 2019 - ieeexplore.ieee.org
The results on investigations of the impedance of the oxide based nanocomposite films
containing silicon and metal nanocrystals are presented. The voltage and frequency …

Resonant tunneling at electron field emission from Si tips coated with SiO2(Si) films

AA Evtukh, OV Pylypova, O Martyniuk, H Mimura - Applied Nanoscience, 2018 - Springer
The electron field emission from Si tips coated with ultrathin nanocomposite SiO 2 (Si) films
containing Si nanocrystals embedded into silicon dioxide matrix of varying thickness have …