Crystallinity of inorganic films grown by atomic layer deposition: Overview and general trends

V Miikkulainen, M Leskelä, M Ritala… - Journal of Applied …, 2013 - pubs.aip.org
Atomic layer deposition (ALD) is gaining attention as a thin film deposition method, uniquely
suitable for depositing uniform and conformal films on complex three-dimensional …

New modalities of strain-control of ferroelectric thin films

AR Damodaran, JC Agar, S Pandya… - Journal of Physics …, 2016 - iopscience.iop.org
Ferroelectrics, with their spontaneous switchable electric polarization and strong coupling
between their electrical, mechanical, thermal, and optical responses, provide functionalities …

Use of ruthenium tetroxide as a precursor and reactant for thin film depositions

J Gatineau, C Dussarrat - US Patent 8,859,047, 2014 - Google Patents
US8859047B2 - Use of ruthenium tetroxide as a precursor and reactant for thin film depositions
- Google Patents US8859047B2 - Use of ruthenium tetroxide as a precursor and reactant for …

[HTML][HTML] Atomic layer deposition of perovskite oxides and their epitaxial integration with Si, Ge, and other semiconductors

MD McDaniel, TQ Ngo, S Hu, A Posadas… - Applied Physics …, 2015 - pubs.aip.org
Atomic layer deposition (ALD) is a proven technique for the conformal deposition of oxide
thin films with nanoscale thickness control. Most successful industrial applications have …

Precursors as enablers of ALD technology: Contributions from University of Helsinki

T Hatanpää, M Ritala, M Leskelä - Coordination Chemistry Reviews, 2013 - Elsevier
The review focuses on ALD precursors of selected elements such as alkaline earth (Mg, Ca,
Sr, Ba), group 4 metals, bismuth, silver, iridium, selenium, tellurium and antimony. These …

Atomic layer deposition of thin-film ceramic electrolytes for high-performance fuel cells

JH Shim, S Kang, SW Cha, W Lee, YB Kim… - Journal of Materials …, 2013 - pubs.rsc.org
This feature article provides a progress review of atomic layer deposition (ALD) for
fabrication of oxide-ion as well as proton conducting ceramic fuel cells. A comprehensive …

Process–property relationship in high-k ALD SrTiO 3 and BaTiO 3: a review

JH Shim, HJ Choi, Y Kim, J Torgersen, J An… - Journal of Materials …, 2017 - pubs.rsc.org
Perovskites exhibit a wide range of remarkable material properties that have the potential to
advance various scientific fields. These properties originate in their unique structure and …

[HTML][HTML] Supercritical fluid technology: A reliable process for high quality BaTiO3 based nanomaterials

G Philippot, C Elissalde, M Maglione… - Advanced Powder …, 2014 - Elsevier
Ferroelectrics materials have been tremendously attractive since the 40 s with the discovery
of ferroelectricity in metal oxide perovskite materials and more precisely in barium titanate …

Recent developments in molecular precursors for atomic layer deposition

AL Johnson, JD Parish - 2018 - books.rsc.org
One field of organometallic and materials chemistry that has seen great advancements over
the last 20 years is that of atomic layer deposition (ALD), and in particular the development …

Review on process-microstructure-performance relationship in ALD-engineered SOFCs

JW Shin, D Go, SH Kye, S Lee, J An - Journal of Physics: Energy, 2019 - iopscience.iop.org
Solid oxide fuel cells (SOFCs) are promising candidates for next-generation energy
conversion devices, and much effort has been made to lower their operating temperature for …