Method for manufacturing a vibrating MEMS circuit
SS Li, S Lee, K Bhattacharjee - US Patent 9,369,105, 2016 - Google Patents
A method for making a micro-electro-mechanical systems (MEMS) vibrating structure is
disclosed. The MEMS is supported by a MEMS anchor system and includes a single-crystal …
disclosed. The MEMS is supported by a MEMS anchor system and includes a single-crystal …
MEMS vibrating structure using an orientation dependent single-crystal piezoelectric thin film layer
K Bhattacharjee, S Zhgoon - US Patent 9,391,588, 2016 - Google Patents
A micro-electrical-mechanical system (MEMS) vibrating structure includes a carrier
substrate, a first anchor, a second anchor, a single crystal piezoelectric body, and a …
substrate, a first anchor, a second anchor, a single crystal piezoelectric body, and a …
High-Q micromechanical resonator devices and filters utilizing same
CTC Nguyen, SS Li - US Patent 7,295,088, 2007 - Google Patents
High-Q micromechanical resonator devices and filters utilizing same are provided. The
devices and filters include a vibrating polysilicon micromechanical “hollow-disk” ring …
devices and filters include a vibrating polysilicon micromechanical “hollow-disk” ring …
High- UHF Spoke-Supported Ring Resonators
A vibrating micromechanical spoke-supported ring resonator employing a central peg-
anchor, balanced non-intrusive quarter-wavelength extensional support beams, and …
anchor, balanced non-intrusive quarter-wavelength extensional support beams, and …
The analysis of the electro-mechanical model of the cylindrical radial composite piezoelectric ceramic transducer
S Liu, S Lin - Sensors and Actuators A: Physical, 2009 - Elsevier
The cylindrical radial composite piezoelectric ceramic transducer is presented and studied.
The transducer consists of an inner radially polarized piezoelectric ceramic thin-walled …
The transducer consists of an inner radially polarized piezoelectric ceramic thin-walled …
The radial composite piezoelectric ceramic transducer
S Lin - Sensors and Actuators A: Physical, 2008 - Elsevier
The radial composite piezoelectric ceramic transducer is presented and analyzed. The
transducer consists of two metal thin circular rings and a thickness polarized piezoelectric …
transducer consists of two metal thin circular rings and a thickness polarized piezoelectric …
Static force transducer based on resonant piezoelectric structure: root cause investigation
S Safour, Y Bernard - Smart Materials and Structures, 2017 - iopscience.iop.org
The aim of this paper is to investigate the design and the integration of a static force sensor
based on a resonant bulk acoustic wave piezoelectric transducer. Experimental …
based on a resonant bulk acoustic wave piezoelectric transducer. Experimental …
Analysis of the asymmetric triple-layered piezoelectric bimorph using equivalent circuit models
SK Ha - The Journal of the Acoustical Society of America, 2001 - pubs.aip.org
An eight-port impedance matrix and an equivalent circuit are presented for the analysis of an
asymmetric triple-layered piezoelectric bimorph with separate electrical ports. The separate …
asymmetric triple-layered piezoelectric bimorph with separate electrical ports. The separate …
An approximated 3-D model of the Langevin transducer and its experimental validation
A Iula, R Carotenuto, M Pappalardo… - The Journal of the …, 2002 - pubs.aip.org
In this work, an approximated 3-D analytical model of the Langevin transducer is proposed.
The model, improving the classical 1-D approach describing the thickness extensional …
The model, improving the classical 1-D approach describing the thickness extensional …